| 000 | 01817nla2a2200373 4500 | ||
|---|---|---|---|
| 001 | 227964 | ||
| 005 | 20231029205548.0 | ||
| 035 | _a(RuTPU)RU\TPU\book\248412 | ||
| 035 | _aRU\TPU\book\248411 | ||
| 090 | _a227964 | ||
| 100 | _a20121213d2012 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 102 | _aRU | ||
| 105 | _ay z 101zy | ||
| 135 | _adrcn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aTechnological features of the dual magnetron sputtering system for reactive deposition of thin film coatings _bЭлектронный ресурс _fD. V. Sidelev _gNational Research Tomsk Polytechnic University ; науч. рук. Y. N. Yurjev |
|
| 203 |
_aТекст _cэлектронный |
||
| 215 | _a1 файл (267 Кб) | ||
| 225 | 1 | _aSection VIII: Modern Physical Methods in Science, Engineering and Medicine | |
| 230 | _aЭлектронные текстовые данные (1 файл : 267 Кб) | ||
| 300 | _aЗаглавие с титульного листа | ||
| 320 | _a[Библиогр.: с. 182 (6 назв.)] | ||
| 337 | _aAdobe Reader | ||
| 463 | 1 |
_0(RuTPU)RU\TPU\book\247697 _t Modern technique and technologies MTT' 2012 _o Proceedings of the 18th international scientific and practical conference of students, post-graduates and young scientists _fTomsk Polytechnic University (TPU) _v[С. 181-182] _d2012 |
|
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aэлектронный ресурс | |
| 700 | 1 |
_aSidelev _bD. V. _cphysicist _cengineer of Tomsk Polytechnic University _f1991- _gDmitry Vladimirovich _2stltpush _3(RuTPU)RU\TPU\pers\34524 |
|
| 702 | 1 |
_aYurjev _bY. N. _4727 |
|
| 712 | 0 | 2 | _aNational Research Tomsk Polytechnic University |
| 801 | 2 |
_aRU _b63413507 _c20160407 _gRCR |
|
| 856 | 4 | _uhttp://www.lib.tpu.ru/fulltext/v/Conferences/2012/C2/ENG/eng_084.pdf | |
| 942 | _cCF | ||