000			02351nam0a2200397 4500
001			255192
005			20231029213112.0
010			_a9780521764834
035			_a(RuTPU)RU\TPU\book\277696
090			_a255192
100			_a20140326d2013 m y0engy50 ba
101	0		_aeng
102			_aGB
105			_aa j 001zy
200	1		_aElectromechanics and MEMS _etextbook _fT. B. Jones, N. Nenadic
210			_aCambridge _cCambridge University Press _d2013
215			_a559 p. _cil.
320			_aIndex: p. 552-559.
330			_aOffering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students understanding of the key principles.
606	1		_aЭлектромеханика _2stltpush _3(RuTPU)RU\TPU\subj\20251
610	1		_aэлектротехника
610	1		_aэлектротехнические изделия
610	1		_aэлектромеханические преобразователи
610	1		_aмикроэлектромеханические датчики
610	1		_aмикроэлектромеханические системы
610	1		_aMEMS
610	1		_aдатчики движения
610	1		_aучебники
610	1		_aанглийский язык
675			_a621.3(075.8) _v3
700		1	_aJones _bT. B. _gThomas
701		1	_aNenadic _bN. _gNenad
801		1	_aRU _b63413507 _c20140326
801		2	_aRU _b63413507 _c20141117 _gRCR
942			_cBK
959			_a44/20140311 _d1 _e0 _fЧЗИЛ:1