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010 _a9781466509542
035 _a(RuTPU)RU\TPU\book\277780
090 _a255275
100 _a20140327d2013 k y0engy50 ba
101 0 _aeng
102 _aUS
105 _aa z 001zy
200 1 _aMicroelectronics to Nanoelectronics: Materials, Devices & Manufacturability
_fedited by A. B. Kaul
210 _aNew York
_cTaylor & Francis Group
_cCRC Press
_d2013
215 _a407 p.
_cil.
320 _aIndex: p. 387-407.
330 _aComposed of contributions from top experts, Microelectronics to Nanoelectronics: Materials, Devices & Manufacturability offers a detailed overview of important recent scientific and technological developments in the rapidly evolving nanoelectronics arena. Under the editorial guidance and technical expertise of noted materials scientist Anupama B. Kaul of the California Institute of Technology's Jet Propulsion Lab, this book captures the ascent of microelectronics into the nanoscale realm. It addresses a wide variety of important scientific and technological issues in nanoelectronics research and development. The book also showcases some key application areas of micro-electro-mechanical-systems (MEMS) that have reached the commercial realm. Capitalizing on Dr. Kaul's considerable technical experience with micro- and nanotechnologies and her extensive research in prestigious academic and industrial labs, the book offers a fresh perspective on application-driven research in micro- and nanoelectronics, including MEMS. Chapters explore how rapid developments in this area are transitioning from the lab to the market, where new and exciting materials, devices, and manufacturing technologies are revolutionizing the electronics industry. Although many micro- and nanotechnologies still face major scientific and technological challenges and remain within the realm of academic research labs, rapid advances in this area have led to the recent emergence of new applications and markets. This handbook encapsulates that exciting recent progress by providing high-quality content contributed by international experts from academia, leading industrial institutions—such as Hewlett-Packard—and government laboratories including the U.S. Department of Energy's Sandia National Laboratory.
606 1 _aМикроэлектроника
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606 1 _aНаноэлектроника
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610 1 _aмикроэлектронные устройства
610 1 _aматериалы
610 1 _aпроизводство
610 1 _aмикроэлектромеханические системы
610 1 _aмикроэлектронная технология
610 1 _aанглийский язык
675 _a621.382.049.77
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702 1 _aKaul
_bA. B.
_gAnupama
_4340
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_c20140327
801 2 _aRU
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_c20141211
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