| 000 | 01037nam1a2200289 4500 | ||
|---|---|---|---|
| 001 | 596679 | ||
| 005 | 20231030033707.0 | ||
| 035 | _a(RuTPU)RU\TPU\tpu\19661 | ||
| 090 | _a596679 | ||
| 100 | _a20110805a1996 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 102 | _aUS | ||
| 200 | 1 |
_aNew broad beam gas ion source for industrial application _fN. V. Gavrilov [et al.] |
|
| 333 | _aВ фонде НТБ ТПУ отсутствует | ||
| 461 | _tJournal of Vacuum Science and Technology A | ||
| 463 |
_tVol. 14, № 3 _vP. 1050-1055 _d1996 |
||
| 610 | 1 | _aтруды учёных ТПУ | |
| 701 | 1 |
_aGavrilov _bN. V. |
|
| 701 | 1 |
_aMesyats _bG. A. _crussian physicist _cacademican, vice-president of RAS _cgraduate of Tomsk Polytechnic Institute _f1936- _gGennady Andreyevich _xTPU _2stltpush _3(RuTPU)RU\TPU\pers\28088 _4070 |
|
| 701 | 1 |
_aNikulin _bS. P. |
|
| 701 | 1 |
_aRadkovskii _bG. V. |
|
| 701 | 1 |
_aElkind _bA. |
|
| 701 | 1 |
_aPerry _bA. J. |
|
| 701 | 1 |
_aTreglio _bJ. R. |
|
| 801 | 1 |
_aRU _b63413507 _c20110805 |
|
| 801 | 2 |
_aRU _b63413507 _c20110805 _gRCR |
|
| 942 | _cBK | ||