| 000 | 01558nam1a2200265 4500 | ||
|---|---|---|---|
| 001 | 602568 | ||
| 005 | 20231030034000.0 | ||
| 035 | _a(RuTPU)RU\TPU\tpu\28465 | ||
| 035 | _aRU\TPU\tpu\19592 | ||
| 090 | _a602568 | ||
| 100 | _a20160620a2012 k y0engy50 ba | ||
| 101 | 1 | _aeng | |
| 102 | _aRU | ||
| 200 | 1 |
_aArc plasma-assisted deposition of nanocrystalline coatings _fO. V. Krysina [et al.] |
|
| 330 | _aThe paper considers peculiarities of vacuum arc plasma-assisted deposition of multicomponent nanocrystalline coatings based on titanium nitride. Advantages and prospects of the modified ion plasma setup used for coating deposition are described. The effect of added elements on the structural phase state and characteristics of titanium nitride-based coatings is demonstrated. | ||
| 333 | _aВ фонде НТБ ТПУ отсутствует | ||
| 463 |
_t25th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV) _vP. 537-540 _d2012 |
||
| 610 | 1 | _aтруды учёных ТПУ | |
| 701 | 1 |
_aKrysina _bO. V. |
|
| 701 | 1 |
_aKoval _bN. N. _cspecialist in the field of electronics _cProfessor of Tomsk Polytechnic University, Doctor of technical sciences _f1948- _gNikolay Nikolaevich _xTPU _2stltpush _3(RuTPU)RU\TPU\pers\34748 |
|
| 701 | 1 |
_aIvanov _bYu. F. _cphysicist _cProfessor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences _f1955- _gYuriy Fedorovich _2stltpush _3(RuTPU)RU\TPU\pers\33559 |
|
| 701 | 1 |
_aShugurov _bV. V. |
|
| 801 | 1 |
_aRU _b63413507 _c20110728 |
|
| 801 | 2 |
_aRU _b63413507 _c20160620 _gRCR |
|
| 942 | _cBK | ||