| 000 | 02793nla2a2200445 4500 | ||
|---|---|---|---|
| 001 | 639133 | ||
| 005 | 20231030040308.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\3537 | ||
| 035 | _aRU\TPU\network\3535 | ||
| 090 | _a639133 | ||
| 100 | _a20150224a2014 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 105 | _aa z 101zy | ||
| 135 | _adrcn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aIon trajectories calculation for negatively biased needle cathode in volume discharge plasma _fA. G. Remnev [et al.] |
|
| 203 |
_aText _celectronic |
||
| 300 | _aTitle screen | ||
| 320 | _a[References: 5 tit.] | ||
| 330 | _aIon trajectories were simulated for the case of multi-needle negatively biased electrode immerged into the volume type plasma. The model was simplified to the 2d case with planar plasma boundary. The electrical field distribution was calculated with the FEA method. Resulting piece wise function was then used to predict ion trajectories emitted from the plasma sheath boundary. Series of the ion trajectories were simulated for different plasma and accelerating gap parameters using single particle analysis. Distribution of the ion current density along the needle surface and angles of the ion incidence were obtained from the simulation. Experimental and theoretical etching profiles are consistent. | ||
| 333 | _aРежим доступа: по договору с организацией-держателем ресурса | ||
| 461 | 1 |
_0(RuTPU)RU\TPU\network\3526 _tJournal of Physics: Conference Series |
|
| 463 | 0 |
_0(RuTPU)RU\TPU\network\3527 _tVol. 552 : International Congress on Energy Fluxes and Radiation Effects (EFRE-2014), 21–26 September 2014, Tomsk, Russia _v[012009, 6 p.] _d2014 |
|
| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aтраектории | |
| 610 | 1 | _aионы | |
| 610 | 1 | _aкатоды | |
| 610 | 1 | _aплазма | |
| 610 | 1 | _aионный ток | |
| 610 | 1 | _aэлектрическое поле | |
| 701 | 1 |
_aRemnev _bA. G. |
|
| 701 | 1 |
_aUemura _bK. |
|
| 701 | 1 |
_aKozyrev _bA. V. |
|
| 701 | 1 |
_aLopatin _bV. V. _cDoctor of physical and mathematical sciences _cProfessor of Tomsk Polytechnic University (TPU) _f1947- _gVladimir Vasilyevich _2stltpush _3(RuTPU)RU\TPU\pers\30091 |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет (ТПУ) _bИнститут физики высоких технологий (ИФВТ) _bКафедра техники и электрофизики высоких напряжений (ТЭВН) _h4779 _2stltpush _3(RuTPU)RU\TPU\col\18692 |
| 801 | 2 |
_aRU _b63413507 _c20161227 _gRCR |
|
| 856 | 4 | _uhttp://iopscience.iop.org/1742-6596/552/1/012009 | |
| 942 | _cCF | ||