| 000 | 03906nla2a2200433 4500 | ||
|---|---|---|---|
| 001 | 640295 | ||
| 005 | 20231030040349.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\4841 | ||
| 035 | _aRU\TPU\network\4831 | ||
| 090 | _a640295 | ||
| 100 | _a20150414a2015 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 105 | _ay z 100zy | ||
| 135 | _adrcn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aDevelopment of New Ion and Plasma Surface Modification Methods _fA. I. Ryabchikov, D. O. Sivin, I. B. Stepanov |
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| 203 |
_aText _celectronic |
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| 225 | 1 | _aPlasma, Microwave, Ion, Electron and Isotope Technologies | |
| 300 | _aTitle screen | ||
| 330 | _aThe review is devoted to the analysis of the present state-of-the-art and development trends of the new methods and equipment being developed in Tomsk Polytechnic University (TPU), for DC vacuum arc-based ion and plasma materials processing. The features and advantages are demonstrated for the method of high-concentration implantation with compensation of surface ion sputtering by metal plasma deposition, the method of metal plasma deposition under repetitively – pulsed ion mixing with ion beams and plasma flow formed in the "Raduga-5" source, and the method of coating deposition and ion implantation, including an application of the filtered DC metal plasma source and high-frequency short-pulsed negative bias voltage with a duty factor in the range 10–99 %. | ||
| 333 | _aРежим доступа: по договору с организацией-держателем ресурса | ||
| 461 | 1 |
_0(RuTPU)RU\TPU\network\4598 _tAdvanced Materials Research : Radiation and nuclear techniques in material science _oScientific Journal |
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| 463 | 1 |
_0(RuTPU)RU\TPU\network\4600 _tVol. 1084 : Physical-Technical Problems of Nuclear Science, Energy Generation, and Power Industry (PTPAI -2014) _oThe VIth International Conference, June 5-7, 2014, Tomsk, Russia _o[proceedings] _fNational Research Tomsk Polytechnic University (TPU) _v[P. 221-224] _d2015 |
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| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aметаллы | |
| 610 | 1 | _aплазма | |
| 610 | 1 | _aсмещения | |
| 610 | 1 | _aповерхности | |
| 700 | 1 |
_aRyabchikov _bA. I. _cProfessor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences _cphysicist _f1950- _gAleksandr Ilyich _2stltpush _3(RuTPU)RU\TPU\pers\30912 |
|
| 701 | 1 |
_aSivin _bD. O. _cphysicist _cSenior researcher of Tomsk Polytechnic University, Candidate of technical sciences _f1978- _gDenis Olegovich _2stltpush _3(RuTPU)RU\TPU\pers\34240 |
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| 701 | 1 |
_aStepanov _bI. B. _cphysicist _cHead of the laboratory of Tomsk Polytechnic University, Doctor of technical sciences _f1968- _gIgor Borisovich _2stltpush _3(RuTPU)RU\TPU\pers\34218 |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет (ТПУ) _bФизико-технический институт (ФТИ) _bЛаборатория № 22 _h6469 _2stltpush _3(RuTPU)RU\TPU\col\19225 |
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет (ТПУ) _bФизико-технический институт (ФТИ) _bЦентр измерений свойств материалов (ЦИСМ) _h6684 _2stltpush _3(RuTPU)RU\TPU\col\19361 |
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет (ТПУ) _bФизико-технический институт (ФТИ) _bКафедра теоретической и экспериментальной физики (ТиЭФ) _h138 _2stltpush _3(RuTPU)RU\TPU\col\18726 |
| 801 | 2 |
_aRU _b63413507 _c20161228 _gRCR |
|
| 856 | 4 | _uhttp://dx.doi.org/10.4028/www.scientific.net/AMR.1084.221 | |
| 942 | _cCF | ||