| 000 | 02748nla2a2200409 4500 | ||
|---|---|---|---|
| 001 | 641339 | ||
| 005 | 20231030040425.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\6239 | ||
| 035 | _aRU\TPU\network\6226 | ||
| 090 | _a641339 | ||
| 100 | _a20150515a2015 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 105 | _ay z 100zy | ||
| 135 | _adrcn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aVolume Self–Sustained Discharge in Atmospheric Pressure Gas with High Pulse Repetition Frequency _fM. V. Zhuravlev, G. E. Remnev, B. G. Shubin |
|
| 203 |
_aText _celectronic |
||
| 225 | 1 | _aMaterial Engineering and Technologies | |
| 300 | _aTitle screen | ||
| 330 | _aThe paper describes a plasma source based on a self-sustained volume discharge for diamond and diamond-like film deposition. The suggested scheme of the electrode system enables to provide stable combustion of the self-sustained volume discharge with high pulse repetition rate in atmospheric pressure gases. Gas flow rate to blow off the interelectrode gap depending on the anode temperature has been considered. | ||
| 333 | _aРежим доступа: по договору с организацией-держателем ресурса | ||
| 461 | 0 |
_0(RuTPU)RU\TPU\network\5920 _tApplied Mechanics and Materials _oScientific Journal |
|
| 463 | 0 |
_0(RuTPU)RU\TPU\network\6028 _tVol. 756 : Mechanical Engineering, Automation and Control Systems (MEACS2014) _oInternational Conference, 16‐18 October, 2014, Tomsk, Russia _o[proceedings] _fNational Research Tomsk Polytechnic University (TPU) _v[P. 269-274] _d2015 |
|
| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aалмазные покрытия | |
| 610 | 1 | _aВЧ-разряд | |
| 610 | 1 | _aгазы | |
| 610 | 1 | _aатмосферное давление | |
| 700 | 1 |
_aZhuravlev _bM. V. _cphysicist _cengineer-researcher of Tomsk Polytechnic University _f1986- _gMikhail Valerievich _2stltpush _3(RuTPU)RU\TPU\pers\34637 |
|
| 701 | 1 |
_aRemnev _bG. E. _cphysicist _cProfessor of Tomsk Polytechnic University, Doctor of technical sciences _f1948- _gGennady Efimovich _2stltpush _3(RuTPU)RU\TPU\pers\31500 |
|
| 701 | 1 |
_aShubin _bB. G. _cphysicist _csenior researcher of Tomsk Polytechnic University _f1944- _gBoris Grigorievich _2stltpush _3(RuTPU)RU\TPU\pers\34638 |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет (ТПУ) _bИнститут физики высоких технологий (ИФВТ) _bЛаборатория № 1 _h6378 _2stltpush _3(RuTPU)RU\TPU\col\19035 |
| 801 | 2 |
_aRU _b63413507 _c20161229 _gRCR |
|
| 856 | 4 | _uhttp://dx.doi.org/10.4028/www.scientific.net/AMM.756.269 | |
| 942 | _cCF | ||