| 000 | 03586nla2a2200493 4500 | ||
|---|---|---|---|
| 001 | 641640 | ||
| 005 | 20231030040434.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\6557 | ||
| 035 | _aRU\TPU\network\6556 | ||
| 090 | _a641640 | ||
| 100 | _a20150526a2014 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 102 | _aUS | ||
| 105 | _ay z 100zy | ||
| 135 | _adrcn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aInternal stresses and structure of multilayer coatings on the basis of Zr-Y-O/Si-Al-N _fM. V. Fedorischeva [et al.] |
|
| 203 |
_aText _celectronic |
||
| 300 | _aTitle screen | ||
| 320 | _a[References: p. 150 (14 tit.)] | ||
| 330 | _aX-ray and TEM research of the structure of multilayered coatings consisting of the alternating layers Si-Al-N and Zr-Y-O of equal thickness are carried out. It is shown that the boundaries between different layers are sharp enough, and the chemical composition in each layer is homogeneous. The phase composition of the layers on the basis of Zr-Y-O contains basicallynanocrystalline ZrO[2] and the layers on the basis of Si-Al-N contain Si[3]N[4] amorphous phase. The internal field of stresses is determined by X-ray and TEM analyses. It is established that thecrystal lattice curvaturetorsion and the internal elastic stresses depend on the grain cross-section size of the Zr-Y-O layer. | ||
| 333 | _aРежим доступа: по договору с организацией-держателем ресурса | ||
| 461 | 0 |
_0(RuTPU)RU\TPU\network\4816 _tAIP Conference Proceedings |
|
| 463 | 0 |
_0(RuTPU)RU\TPU\network\4814 _tVol. 1623 : International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk, Russia, 3–5 September 2014 _o[proceedings] _fNational Research Tomsk Polytechnic University (TPU) _v[P. 147-150] _d2014 |
|
| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aвнутреннее напряжение | |
| 610 | 1 | _aмногослойные покрытия | |
| 610 | 1 | _aфазовый состав | |
| 610 | 1 | _aслои | |
| 610 | 1 | _aрентгеновские исследования | |
| 610 | 1 | _aПЭМ | |
| 610 | 1 | _aпросвечивающая электронная микроскопия | |
| 701 | 1 |
_aFedorischeva _bM. V. _gMarina |
|
| 701 | 1 |
_aSergeev _bV. P. _cspecialist in the field of materials science _cProfessor of Tomsk Polytechnic University, doctor of technical Sciences _f1949- _gViktor Petrovich _2stltpush _3(RuTPU)RU\TPU\pers\32730 |
|
| 701 | 1 |
_aKalashnikov _bM. P. _cphysicist _cEngineer of Tomsk Polytechnic University _gMark Petrovich _2stltpush _3(RuTPU)RU\TPU\pers\33561 |
|
| 701 | 1 |
_aVoronov _bA. V. _gAndrei |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет (ТПУ) _bИнститут физики высоких технологий (ИФВТ) _bКафедра физики высоких технологий в машиностроении (ФВТМ) _h2087 _2stltpush _3(RuTPU)RU\TPU\col\18687 |
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет (ТПУ) _bИнститут физики высоких технологий (ИФВТ) _bКафедра наноматериалов и нанотехнологий (НМНТ) _h4572 _2stltpush _3(RuTPU)RU\TPU\col\18685 |
| 801 | 2 |
_aRU _b63413507 _c20170109 _gRCR |
|
| 856 | 4 | _uhttp://dx.doi.org/10.1063/1.4898904 | |
| 856 | 4 | _uhttp://earchive.tpu.ru/handle/11683/35688 | |
| 942 | _cCF | ||