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090 _a641721
100 _a20150530d2014 k y0rusy50 ba
101 0 _aeng
105 _aa z 101zy
135 _adrgn ---uucaa
181 0 _ai
182 0 _ab
200 1 _aThe effect of Si content on structure and mechanical features of silicon-containing calcium phosphorus-based films deposited by rf-magnetron sputtering on titanium substrate treated by pulsed electron beam
_fM. A. Surmeneva [et al.]
203 _aText
_celectronic
225 1 _aAdvanced Material & Nanotechnology
225 1 _aNano-Technology
300 _aTitle screen
320 _a[References: 13 tit.]
330 _aSilicon-containing calcium phosphate (Si-CaP)coatings were fabricated by radio frequency (rf) magnetronsputtering of targets prepared from hydroxyapatite (HA) powderwith different silicon content. A powder of Si-HA(Ca[10](PO[4])[6-x](SiO[4])[x](OH)[2-x], x=0.5 and 1.72) was prepared bymechanochemical activation and then used as a precursorpowderto prepare a target for sputtering. The titanium substratewas acid etched and treated with pulsed electron beam with anenergy density of 15 J/cm{2}. The phase composition and structure,nanohardness and Young’s modulus of Si-CaP coating depositedon titanium substrate were investigated by X-ray diffraction andnanoindentation test, respectively. The average crystallite size asdetermined by XRD was 28 nm for coatings obtained bysputtering of the target prepared from the Si-HA powder (x=0.5),whereas Si-CaP (Si-HA powder x=1.72) films showed anamorphous structure. The nanohardness and the Young’smodulus of the Si-HA coating (x=0.5) deposited on titaniumtreated by pulsed electron beam treatment are enhanced to 4.5and 113 GPa compared to titanium substrate. Increase of Sicontent resulted in a dramatic reduction of the nanohardness andYoung’s modulus of Si-CaP films. However, Si-CaP with thehighest Si content exhibited significantly lower values of elasticmodulus, but slightly higher values of H/E and H[3]/E[2], than didthe non-coated specimens. Therefore, the structure of films has asignificant effect on tribological and mechanical properties of thedeposited coatings. Rf-magnetron sputtering allowed to produceSi-CaP coatings with higher nanohardness and lower elasticmodulus compared to titanium substrate.
337 _aAdobe Reader
463 0 _0(RuTPU)RU\TPU\network\6394
_tThe 9th International Forum on Strategic Techology (IFOST-2014), September 21-23, 2014, Cox's Bazar, Bangladesh
_o[proceedings]
_v[3 p.]
_d2014
610 1 _aэлектронный ресурс
610 1 _aтруды учёных ТПУ
610 1 _aраспыление
610 1 _aфосфат кальция
610 1 _aнанотвердость
610 1 _aкремний
610 1 _aпленки
610 1 _aмагнетронное распыление
610 1 _aВЧ-распыление
610 1 _aэлектронные пучки
610 1 _aподложки
701 1 _aSurmeneva (Ryabtseva)
_bM. A.
_cspecialist in the field of material science
_cengineer-researcher of Tomsk Polytechnic University, Associate Scientist
_f1984-
_gMaria Alexandrovna
_2stltpush
_3(RuTPU)RU\TPU\pers\31894
701 1 _aSurmenev
_bR. A.
_cphysicist
_cAssociate Professor of Tomsk Polytechnic University, Senior researcher, Candidate of physical and mathematical sciences
_f1982-
_gRoman Anatolievich
_2stltpush
_3(RuTPU)RU\TPU\pers\31885
701 1 _aTyurin
_bA. I.
701 1 _aMukhametkaliev
_bT. M.
_cphysicist
_cresearch engineer at Tomsk Polytechnic University
_f1991-
_gTimur Mukhamedrashidovich
_2stltpush
_3(RuTPU)RU\TPU\pers\34243
701 1 _aTeresov
_bA. D.
701 1 _aKoval
_bN. N.
_cspecialist in the field of electronics
_cProfessor of Tomsk Polytechnic University, Doctor of technical sciences
_f1948-
_gNikolay Nikolaevich
_2stltpush
_3(RuTPU)RU\TPU\pers\34748
701 1 _aPirozhkova
_bT. S.
701 1 _aShuvarin
_bI. A.
701 1 _aChudinova
_bE. A.
_cphysicist
_claboratory assistant of Tomsk Polytechnic University
_f1993-
_gEkaterina Aleksandrovna
_2stltpush
_3(RuTPU)RU\TPU\pers\34765
701 1 _aSyrtanov
_bM. S.
_cphysicist
_cengineer of Tomsk Polytechnic University
_f1990-
_gMaksim Sergeevich
_2stltpush
_3(RuTPU)RU\TPU\pers\34764
712 0 2 _aНациональный исследовательский Томский политехнический университет (ТПУ)
_bФизико-технический институт (ФТИ)
_bКафедра теоретической и экспериментальной физики (ТиЭФ)
_bЦентр технологий (ЦТ)
_h408
_2stltpush
_3(RuTPU)RU\TPU\col\20620
712 0 2 _aНациональный исследовательский Томский политехнический университет (ТПУ)
_bФизико-технический институт (ФТИ)
_bКафедра теоретической и экспериментальной физики (ТиЭФ)
_h138
_2stltpush
_3(RuTPU)RU\TPU\col\18726
712 0 2 _aНациональный исследовательский Томский политехнический университет (ТПУ)
_bИнститут физики высоких технологий (ИФВТ)
_bКафедра сильноточной электроники (СЭ)
_h2047
_2stltpush
_3(RuTPU)RU\TPU\col\18691
712 0 2 _aНациональный исследовательский Томский политехнический университет (ТПУ)
_bФизико-технический институт (ФТИ)
_bКафедра общей физики (ОФ)
_h136
_2stltpush
_3(RuTPU)RU\TPU\col\18734
801 2 _aRU
_b63413507
_c20161215
_gRCR
856 4 _uhttp://180.211.172.109/ifost2014Pro/pdf/S5-P53.pdf
942 _cCF