| 000 | 03538nla2a2200457 4500 | ||
|---|---|---|---|
| 001 | 643027 | ||
| 005 | 20231030040523.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\8015 | ||
| 035 | _aRU\TPU\network\8013 | ||
| 090 | _a643027 | ||
| 100 | _a20150827a2015 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 102 | _aGB | ||
| 105 | _ay z 100zy | ||
| 135 | _adrgn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aEffect of the anisotropy of monocrystalline silicon mechanical properties on the dynamic characteristics of a micromechanical gyroscope _fT. G. Nesterenko [et al.] |
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| 203 |
_aText _celectronic |
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| 300 | _aTitle screen | ||
| 320 | _a[References: 9 tit.] | ||
| 330 | _aThe aim of the research was to determine the effect of temperature on mechanical properties of a micromechanical gyroscope with the sensing element mounted on a silicon wafer, with the crystallographic orientation of (100) (110) (111). The research is of current relevancy since the metrological characteristics that depend on the eigenfrequencies over the full temperature range are to be controlled. The temperature-modal analysis of the micromechanical gyroscope model was performed with ANSYS program. The temperature dependence for eigenfrequencies was obtained. The dependence of the scale factor on temperature for the most temperature-independent variant of sensor positioning on the wafer was determined. The developed mathematical model was used to find the forms of the output oscillations of the gyroscope. | ||
| 333 | _aРежим доступа: по договору с организацией-держателем ресурса | ||
| 337 | _aAdobe Reader | ||
| 461 | 1 |
_0(RuTPU)RU\TPU\network\2008 _tIOP Conference Series: Materials Science and Engineering |
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| 463 | 1 |
_0(RuTPU)RU\TPU\network\7891 _tVol. 81 : Radiation-Thermal Effects and Processes in Inorganic Materials _oInternational Scientific Conference, 3-8 November 2014, Tomsk, Russia _o[proceedings] _v[012096, 8 p.] _d2015 |
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| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aанизотропия | |
| 610 | 1 | _aмонокристаллический кремний | |
| 610 | 1 | _aдинамические характеристики | |
| 610 | 1 | _aгироскопы | |
| 701 | 1 |
_aNesterenko _bT. G. _cspecialist in the field of mechanical engineering _cAssociate Professor of Tomsk Polytechnic University, Candidate of technical sciences _f1946- _gTamara Georgievna _2stltpush _3(RuTPU)RU\TPU\pers\30970 |
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| 701 | 1 |
_aVtorushin _bS. E. |
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| 701 | 1 |
_aБарбин _bЕ. С. _cспециалист в области точного приборостроения _cинженер Томского политехнического университета _f1988- _gЕвгений Сергеевич _2stltpush _3(RuTPU)RU\TPU\pers\29889 |
|
| 701 | 1 |
_aKoleda _bA. N. _cSpecialist in the field of instrument making _cEngineer of Tomsk Polytechnic University _f1985- _gAleksey Nikolaevich _2stltpush _3(RuTPU)RU\TPU\pers\33286 |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет (ТПУ) _bИнститут неразрушающего контроля (ИНК) _bКафедра точного приборостроения (ТПС) _h63 _2stltpush _3(RuTPU)RU\TPU\col\18717 |
| 801 | 2 |
_aRU _b63413507 _c20161212 _gRCR |
|
| 856 | 4 | _uhttp://dx.doi.org/10.1088/1757-899X/81/1/012096 | |
| 856 | 4 | _uhttp://earchive.tpu.ru/handle/11683/14740 | |
| 942 | _cCF | ||