| 000 | 03323nla2a2200493 4500 | ||
|---|---|---|---|
| 001 | 644620 | ||
| 005 | 20231030040625.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\9703 | ||
| 035 | _aRU\TPU\network\9702 | ||
| 090 | _a644620 | ||
| 100 | _a20151123a2015 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 102 | _aGB | ||
| 105 | _ay z 101zy | ||
| 135 | _adrcn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aMagnetron deposition of TCO films using ion beam _fO. Kh. Asainov, S. P. Umnov, A. Chinin |
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| 203 |
_aText _celectronic |
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| 300 | _aTitle screen | ||
| 320 | _a[References: 12 tit.] | ||
| 330 | _aThin films of tin oxide (TO) were deposited on the glass substrates at room temperature using reactive magnetron sputtering at various oxygen partial pressures. After the deposition the films were irradiated with argon ions beam. The change of the optical and electrical properties of the films depending on the irradiation time was studied. Films optical properties in the range of 300-1100 nm were investigated by photometry as well as their structural properties were studied using X-ray diffraction. Diffractometric research showed that the films, deposited on a substrate, have a crystal structure, and after argon ions irradiation they become quasi-crystalline (amorphous). It was found that the transmission increases proportionally with the irradiation time, but the surface resistance -disproportionally. | ||
| 333 | _aРежим доступа: по договору с организацией-держателем ресурса | ||
| 461 | 1 |
_0(RuTPU)RU\TPU\network\3526 _tJournal of Physics: Conference Series |
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| 463 | 0 |
_0(RuTPU)RU\TPU\network\9636 _tVol. 652 : Gas Discharge Plasmas and Their Applications (GDP 2015) _o12th International Conference, 6–11 September 2015, Tomsk, Russia _o[proceedings] _v[012046, 4 p.] _d2015 |
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| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aмагнетронное осаждение | |
| 610 | 1 | _aионные пучки | |
| 610 | 1 | _aтонкие пленки | |
| 610 | 1 | _aмагнетронные напыления | |
| 610 | 1 | _aоптические свойства | |
| 610 | 1 | _aрентгеновские лучи | |
| 610 | 1 | _aдифракция | |
| 610 | 1 | _aкристаллические структуры | |
| 700 | 1 |
_aAsainov _bO. Kh. _cphysicist _cHead of the laboratory of Tomsk Polytechnic University, Candidate of physical and mathematical sciences _f1957- _gOleg Khaydarovich _2stltpush _3(RuTPU)RU\TPU\pers\34632 |
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| 701 | 1 |
_aUmnov _bS. P. _cphysicist _cSenior researcher of Tomsk Polytechnic University, Candidate of physical and mathematical sciences _f1957- _gSergey Pavlovich _2stltpush _3(RuTPU)RU\TPU\pers\34215 |
|
| 701 | 1 |
_aChinin _bA. |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет (ТПУ) _bФизико-технический институт (ФТИ) _bКафедра технической физики (№ 23) (ТФ) _h52 _2stltpush _3(RuTPU)RU\TPU\col\18732 |
| 801 | 1 |
_aRU _b63413507 _c20151005 |
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| 801 | 2 |
_aRU _b63413507 _c20161122 _gRCR |
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| 856 | 4 | 0 | _uhttp://dx.doi.org/10.1088/1742-6596/652/1/012046 |
| 856 | 4 | 0 | _uhttp://earchive.tpu.ru/handle/11683/18225 |
| 942 | _cCF | ||