| 000 | 03174nla2a2200469 4500 | ||
|---|---|---|---|
| 001 | 646506 | ||
| 005 | 20231030040731.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\11642 | ||
| 035 | _aRU\TPU\network\11640 | ||
| 090 | _a646506 | ||
| 100 | _a20160302a2016 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 105 | _ay z 100zy | ||
| 135 | _adrcn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aThe Deposition of Silicon-Carbon Coatings in Plasma Based Nonself-Sustained Arc Discharge with Heated Cathode _fA. S. Grenadyorov [et al.] |
|
| 203 |
_aText _celectronic |
||
| 225 | 1 | _aDischarge and Plasma-Beam Technology | |
| 300 | _aTitle screen | ||
| 330 | _aSilicon-carbon coatings on silicon substrates were deposited in plasma based nonself-sustained arc discharge with heated cathode by plasma polymerization of silicon organic agent such as polyphenyl methylsiloxane (PPhMS). Silicon-carbon coatings were deposited at PPhMS flow rate of 0.012 ml/min, argon pressure of 0-0.1 Pa, discharge current of 5-8 A, discharge voltage of 130-150 V, and filament current of 68 A. Bipolar pulsed bias voltage was supplied on the substrate during coating deposition. Surface morphology, hardness and elastic modulus of silicon-carbon films were investigated after the deposition. The film surface is very smooth with root-mean-square roughness of 0.579 nm. Maximum hardness of coatings was 11 GPa, and maximum elastic modulus was 142 GPa. | ||
| 333 | _aРежим доступа: по договору с организацией-держателем ресурса | ||
| 461 | 0 |
_0(RuTPU)RU\TPU\network\11477 _tKey Engineering Materials _oScientific Journal |
|
| 463 | 0 |
_0(RuTPU)RU\TPU\network\11478 _tVol. 685 : High Technology: Research and Applications 2015 (HTRA 2015) _oThe IV International Conference, April 21-24, 2015, Tomsk, Russia _o[proceedings] _fNational Research Tomsk Polytechnic University (TPU) ; ed. N. V. Martyushev, A. M. Bogdan _v[P. 643-647] _d2016 |
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| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aалмазоподобный углерод | |
| 610 | 1 | _aкремний-углерод | |
| 610 | 1 | _aпленки | |
| 610 | 1 | _aпокрытия | |
| 610 | 1 | _aплазма крови | |
| 610 | 1 | _aдуговые разряды | |
| 610 | 1 | _aкатоды | |
| 701 | 1 |
_aGrenadyorov _bA. S. |
|
| 701 | 1 |
_aOskomov _bK. V. |
|
| 701 | 1 |
_aSoloviev _bA. A. _cspecialist in the field of hydrogen energy _cAssociate Professor of Tomsk Polytechnic University, Candidate of technical sciences _f1977- _gAndrey Aleksandrovich _2stltpush _3(RuTPU)RU\TPU\pers\30863 |
|
| 701 | 1 |
_aRabotkin _bS. V. |
|
| 701 | 1 |
_aKovsharov _bN. F. |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет (ТПУ) _bФизико-технический институт (ФТИ) _bКафедра теоретической и экспериментальной физики (ТиЭФ) _h138 _2stltpush _3(RuTPU)RU\TPU\col\18726 |
| 801 | 2 |
_aRU _b63413507 _c20160302 _gRCR |
|
| 856 | 4 | _uhttp://dx.doi.org/10.4028/www.scientific.net/KEM.685.643 | |
| 942 | _cCF | ||