| 000 | 03209nla2a2200469 4500 | ||
|---|---|---|---|
| 001 | 646516 | ||
| 005 | 20231030040732.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\11652 | ||
| 035 | _aRU\TPU\network\11649 | ||
| 090 | _a646516 | ||
| 100 | _a20160302a2016 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 105 | _ay z 100zy | ||
| 135 | _adrcn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aCoating Composition Evolution during the Deposition of Al and N from Plasma on a Cylindrical Substrate _fS. A. Shanin, A. G. Knyazeva, O. N. Kryukova |
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| 203 |
_aText _celectronic |
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| 225 | 1 | _aDischarge and Plasma-Beam Technology | |
| 300 | _aTitle screen | ||
| 330 | _aThis paper presents the results of the numerical study of the coating composition evolution deposited on a cylindrical specimen from plasma containing aluminum and nitrogen. Calculations were based on a coupling model, which accounted for various transfer mechanisms and staged chemical reactions in the coating and in the transient zone. The evolution of the coating composition is connected with transfer processes, chemical reactions, and with the change of effective properties. | ||
| 333 | _aРежим доступа: по договору с организацией-держателем ресурса | ||
| 461 | 0 |
_0(RuTPU)RU\TPU\network\11477 _tKey Engineering Materials _oScientific Journal |
|
| 463 | 0 |
_0(RuTPU)RU\TPU\network\11478 _tVol. 685 : High Technology: Research and Applications 2015 (HTRA 2015) _oThe IV International Conference, April 21-24, 2015, Tomsk, Russia _o[proceedings] _fNational Research Tomsk Polytechnic University (TPU) ; ed. N. V. Martyushev, A. M. Bogdan _v[P. 690-694] _d2016 |
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| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aпокрытия | |
| 610 | 1 | _aосаждение | |
| 610 | 1 | _aкинетика | |
| 610 | 1 | _aчисленное моделирование | |
| 610 | 1 | _aфазообразование | |
| 610 | 1 | _aрастяжение | |
| 610 | 1 | _aтермодинамика | |
| 610 | 1 | _aплазма | |
| 610 | 1 | _aподложки | |
| 700 | 1 |
_aShanin _bS. A. _cphysicist _cprogrammer, senior teacher Tomsk Polytechnic University, candidate of physico-mathematical Sciences _f1985- _gSergei Aleksandrovich _2stltpush _3(RuTPU)RU\TPU\pers\33033 |
|
| 701 | 1 |
_aKnyazeva _bA. G. _cRussian physicist _cProfessor of Tomsk Polytechnic University, doctor of physico-mathematical Sciences _f1962- _gAnna Georgievna _2stltpush _3(RuTPU)RU\TPU\pers\32712 |
|
| 701 | 1 |
_aKryukova _bO. N. _cresearcher Tomsk Polytechnic University, candidate of physico-mathematical Sciences _cphysicist _gOlga Nikolaevna _2stltpush _3(RuTPU)RU\TPU\pers\33032 |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет (ТПУ) _bИнститут физики высоких технологий (ИФВТ) _bКафедра физики высоких технологий в машиностроении (ФВТМ) _h2087 _2stltpush _3(RuTPU)RU\TPU\col\18687 |
| 801 | 2 |
_aRU _b63413507 _c20160302 _gRCR |
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| 856 | 4 | _uhttp://dx.doi.org/10.4028/www.scientific.net/KEM.685.690 | |
| 942 | _cCF | ||