| 000 | 03964nlm1a2200409 4500 | ||
|---|---|---|---|
| 001 | 647782 | ||
| 005 | 20231030040814.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\12938 | ||
| 090 | _a647782 | ||
| 100 | _a20160422a2014 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 135 | _adrcn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aInvestigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering _fN. N. Nikitenkov [et al.] |
|
| 203 |
_aText _celectronic |
||
| 300 | _aTitle screen | ||
| 320 | _a[References: p. 1234 (12 tit.)] | ||
| 330 | _aThe structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used. | ||
| 333 | _aРежим доступа: по договору с организацией-держателем ресурса | ||
| 461 |
_tJournal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques _oScientific Journal |
||
| 463 |
_tVol. 8, iss. 6 _v[P. 1230-1234] _d2014 |
||
| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 701 | 1 |
_aNikitenkov _bN. N. _cRussian physicist _cProfessor of Tomsk Polytechnic University, Doctor of Physical and Mathematical Sciences _f1953- _gNikolai Nikolaevich _2stltpush _3(RuTPU)RU\TPU\pers\30409 |
|
| 701 | 1 |
_aКиселева _bЕ. С. _cфизик _cассистент, инженер Томского политехнического университета _f1982- _gЕвгения Сергеевна _2stltpush _3(RuTPU)RU\TPU\pers\31773 |
|
| 701 | 1 |
_aKonishchev _bM. E. _cphysicist _cengineer of Tomsk Polytechnic University, post graduate _f1987- _gMaksim Evgenievich _2stltpush _3(RuTPU)RU\TPU\pers\34212 |
|
| 701 | 1 |
_aSypchenko _bV. S. _cphysicist _cJunior researcher of Tomsk Polytechnic University, assistant _f1987- _gVladimir Sergeevich _2stltpush _3(RuTPU)RU\TPU\pers\33791 |
|
| 701 | 1 |
_aNikitenkov _bA. N. _cphysicist, hydrogeologist _cassociate Professor of Tomsk Polytechnic University, candidate of geological and mineralogical Sciences _f1983- _gAleksey Nikolaevich _2stltpush _3(RuTPU)RU\TPU\pers\33263 |
|
| 701 | 1 |
_aPichugin _bV. F. _cProfessor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences _cPhysicist _f1944- _gVladimir Fyodorovich _2stltpush _3(RuTPU)RU\TPU\pers\30933 |
|
| 701 | 1 |
_aShulepov _bI. A. _cphysicist _cEngineer-designer of Tomsk Polytechnic University, Candidate of physical and mathematical sciences _f1954- _gIvan Anisimovich _2stltpush _3(RuTPU)RU\TPU\pers\33092 |
|
| 701 | 1 |
_aMattias _bE. _gEpple |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет (ТПУ) _bФизико-технический институт (ФТИ) _bКафедра общей физики (ОФ) _h136 _2stltpush _3(RuTPU)RU\TPU\col\18734 |
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет (ТПУ) _bФизико-технический институт (ФТИ) _bКафедра экспериментальной физики (ЭФ) _h7596 _2stltpush _3(RuTPU)RU\TPU\col\21255 |
| 801 | 2 |
_aRU _b63413507 _c20160422 _gRCR |
|
| 856 | 4 | _uhttp://dx.doi.org/10.1134/S1027451014060391 | |
| 942 | _cCF | ||