000 02866nlm1a2200409 4500
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005 20231030040900.0
035 _a(RuTPU)RU\TPU\network\14265
035 _aRU\TPU\network\14258
090 _a649104
100 _a20160620a2012 k y0engy50 ba
101 0 _aeng
135 _adrcn ---uucaa
181 0 _ai
182 0 _ab
200 1 _aStructure and phase composition of a chromium–silicon system modified by high current electron beams
_fV. V. Uglov [et al.]
203 _aText
_celectronic
300 _aTitle screen
320 _a[References: p. 72 (20 tit.]
330 _aThe results of studies of the structure-phase state of a chromium-coated silicon substrate system’s subsurface layer treated with low-energy high-current electron beams, 50–200 µs in duration and with an energy density of 15 J/cm2, are reported. The data of raster electron microscopy and X-ray structural and spectral microanalysis revealed the formation of a chromium-doped silicon layer with a thickness of 2–38 µm, chromium-enriched silicon dendrites, chromium disilicide CrSi2, and an amorphous eutectic layer (the characteristic cross-section size of the chromium-enriched phase extrusions is ~50 nm). The structure-phase transformations are discussed taking into account the peculiarities of the distribution of temperature, diffusion and convective mass-transfer in the modified layer.
333 _aРежим доступа: по договору с организацией-держателем ресурса
461 _tJournal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
_d2007-
463 _tVol. 6, № 1
_v[P. 67-72]
_d2012
610 1 _aэлектронный ресурс
610 1 _aтруды учёных ТПУ
610 1 _aстуктура
610 1 _aфазовый состав
610 1 _aхром-кремний
701 1 _aUglov
_bV. V.
_cPhysicist
_cLeading researcher of Tomsk Polytechnic University, Doctor of physical and mathematical sciences
_f1954-
_gVladimir Vasilievich
_2stltpush
_3(RuTPU)RU\TPU\pers\36737
701 1 _aKvasov
_bN. T.
_cphysicist
_cleading researcher of Tomsk Polytechnic University, Doctor of physical and mathematical sciences
_f1949-
_gNikolay Trafimovich
_2stltpush
_3(RuTPU)RU\TPU\pers\36768
701 1 _aPetukhov
_bY. A.
701 1 _aTeresov
_bA. D.
701 1 _aKoval
_bN. N.
_cspecialist in the field of electronics
_cProfessor of Tomsk Polytechnic University, Doctor of technical sciences
_f1948-
_gNikolay Nikolaevich
_2stltpush
_3(RuTPU)RU\TPU\pers\34748
701 1 _aIvanov
_bYu. F.
_cphysicist
_cProfessor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences
_f1955-
_gYuriy Fedorovich
_2stltpush
_3(RuTPU)RU\TPU\pers\33559
801 2 _aRU
_b63413507
_c20210628
_gRCR
856 4 _uhttp://dx.doi.org/10.1134/S1027451012010193
942 _cCF