000 02320nlm1a2200385 4500
001 649109
005 20231030040900.0
035 _a(RuTPU)RU\TPU\network\14270
035 _aRU\TPU\network\14268
090 _a649109
100 _a20160621a2011 k y0engy50 ba
101 0 _aeng
135 _adrcn ---uucaa
181 0 _ai
182 0 _ab
200 1 _aA plasma generator based on nonself-sustained low-pressure glow discharge with a large-volume hollow cathode
_fI. V. Lopatin [et al.]
203 _aText
_celectronic
300 _aTitle screen
320 _a[References: p. 146 (13 tit.)]
330 _aThe results of studying nonself-sustained glow discharges in an electrode system with a hollow cathode with a volume of 0.25 m3 are presented. A high-current (up to 35 A) nonself-sustained glow discharge at low pressures (0.3–1.0 Pa) is initiated and sustained with the help of an auxiliary cold-hollow-cathode arc discharge. When the current of a nonself-sustained glow discharge increases from 2 to 35 A, its burning voltage changes from 40 to 300 V. These values are much lower than the voltage for a self-sustained glow discharge in the same electrode system. At a discharge current of 30 A, the electron concentration at the center of the hollow cathode is n e ~ 1010–1011 cm-3 and the electron temperature is T e ˜ 2 eV. The discharge considered can be used in the system for modification of materials and products.
333 _aРежим доступа: по договору с организацией-держателем ресурса
461 _tInstruments and Experimental Techniques
_d2000-
463 _tVol. 54, № 1
_v[P. 141-146]
_d2011
610 1 _aэлектронный ресурс
610 1 _aтруды учёных ТПУ
610 1 _aгенератор плазмы
610 1 _aнизкое давление
610 1 _aполный катод
701 1 _aLopatin
_bI. V.
701 1 _aAkhmadeev
_bY. K.
701 1 _aKoval
_bN. N.
_cspecialist in the field of electronics
_cProfessor of Tomsk Polytechnic University, Doctor of technical sciences
_f1948-
_gNikolay Nikolaevich
_2stltpush
_3(RuTPU)RU\TPU\pers\34748
701 1 _aShchanin
_bP. M.
801 2 _aRU
_b63413507
_c20161020
_gRCR
856 4 _uhttp://dx.doi.org/10.1134/S0020441211010179
942 _cCF