| 000 | 02377nlm2a2200469 4500 | ||
|---|---|---|---|
| 001 | 649146 | ||
| 005 | 20231030040901.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\14307 | ||
| 035 | _aRU\TPU\network\13578 | ||
| 090 | _a649146 | ||
| 100 | _a20160622a2004 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 105 | _ay z 100zy | ||
| 135 | _adrcn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aModifcation of thin metal and ceramic filmsby UV and IR laser adiation _fV. M. Orlovskii [et al.] |
|
| 203 |
_aText _celectronic |
||
| 300 | _aTitle screen | ||
| 320 | _a[References: p. 242-243 (28 tit.)] | ||
| 330 | _aInvestigation of the modes of thin metal and ceramic films (0,3- 1 m) removal from the glas and stainles stel substrateby IR and UV laser adiation has ben performed. It is presented that he ficient film destruction and removal ocurs dueto laser induced thermal strength under laser fluxes ofO.5 J/cm2 not suficient for phase transformation. | ||
| 333 | _aРежим доступа: по договору с организацией-держателем ресурса | ||
| 461 | 0 |
_0(RuTPU)RU\TPU\network\12028 _tProceedings of SPIE |
|
| 463 |
_tVol. 5483 _v[P. 238-243] _d2004 |
||
| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aвзаимодействия с лазерным лучом | |
| 610 | 1 | _aтонкая пленка покрытия | |
| 701 | 1 |
_aOrlovskii _bV. M. |
|
| 701 | 1 |
_aTarasenko _bV. F. _cphysicist _cProfessor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences _f1946- _gVictor Fedotovich _2stltpush _3(RuTPU)RU\TPU\pers\32090 |
|
| 701 | 1 |
_aFedenev _bA. V. |
|
| 701 | 1 |
_aAlekseev _bS. B. |
|
| 701 | 1 |
_aGoncharenko _bI. M. |
|
| 701 | 1 |
_aKoval _bN. N. _cspecialist in the field of electronics _cProfessor of Tomsk Polytechnic University, Doctor of technical sciences _f1948- _gNikolay Nikolaevich _2stltpush _3(RuTPU)RU\TPU\pers\34748 |
|
| 701 | 1 |
_aLipatov _bE. I. |
|
| 701 | 1 |
_aTrtica _bM. A. |
|
| 701 | 1 |
_aGaković _bB. M. |
|
| 701 | 1 |
_aPetkovska _bL. T. |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет (ТПУ) _c(2009- ) _2stltpush _3(RuTPU)RU\TPU\col\15902 |
| 801 | 2 |
_aRU _b63413507 _c20170210 _gRCR |
|
| 856 | 4 | _uhttp://dx.doi.org/10.1117/12.562979 | |
| 942 | _cCF | ||