| 000 | 01976nlm1a2200361 4500 | ||
|---|---|---|---|
| 001 | 649166 | ||
| 005 | 20231030040902.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\14327 | ||
| 035 | _aRU\TPU\network\14325 | ||
| 090 | _a649166 | ||
| 100 | _a20160623a2003 k y0rusy50 ba | ||
| 101 | 0 | _aeng | |
| 135 | _adrgn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aPlasma sources based on a low-pressure arc discharge _fYu. H. Akhmadeev [et al.] |
|
| 203 |
_aText _celectronic |
||
| 300 | _aTitle screen | ||
| 320 | _a[References: p. 253-245] | ||
| 330 | _aThis article presents two types of a hollow-cathode plasma source based on an arc discharge where the electrons emitted either by a hot filament or by a surface-discharge-based trigger system initiate a gas arc discharge. The sources produce gas plasmas of densities 1010–1012 cm-3 in large volumes of up to 0.5 m3 at a discharge current of 100–200 A and at a pressure of 10-1–10-2 Pa. Consideration is given to some peculiarities of the operation of the plasma sources with various working gases (Ar, N2, O2). The erosion rate of the cold hollow cathode in the designed plasma sources is shown to be 10 times lower than that found in an ordinary one. The sources are employed for plasma-assisted surface modification of solids. | ||
| 461 | _tLaser and Particle Beams | ||
| 463 |
_tVol. 21, № 2 _v[P. 249-254] _d2003 |
||
| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aдуговой разряд | |
| 610 | 1 | _aисточник плазмы | |
| 701 | 1 |
_aAkhmadeev _bYu. H. |
|
| 701 | 1 |
_aGrigoriev _bS. V. |
|
| 701 | 1 |
_aKoval _bN. N. _cspecialist in the field of electronics _cProfessor of Tomsk Polytechnic University, Doctor of technical sciences _f1948- _gNikolay Nikolaevich _2stltpush _3(RuTPU)RU\TPU\pers\34748 |
|
| 701 | 1 |
_aSchanin _bP. M. |
|
| 801 | 2 |
_aRU _b63413507 _c20161020 _gRCR |
|
| 856 | 4 | _uhttp://dx.doi.org/10.1017/S0263034603212131 | |
| 942 | _cCF | ||