| 000 | 02733nlm1a2200385 4500 | ||
|---|---|---|---|
| 001 | 649334 | ||
| 005 | 20231030040908.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\14496 | ||
| 090 | _a649334 | ||
| 100 | _a20160701a2014 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 102 | _aUS | ||
| 135 | _adrcn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aPlasma immersion ion charge state and mass spectrometer _fI. B. Stepanov [et al.] |
|
| 203 |
_aText _celectronic |
||
| 300 | _aTitle screen | ||
| 320 | _a[References: 6 tit.] | ||
| 330 | _aInvestigation results of charge state of monocomponent plasma of Ti, Zr, W, and N, as well as that of multicomponent metal plasma of Ti/Zr (50/50 at.%) using plasma-immersion time-of-flightspectrometer are presented in the paper. The case of pressure impact in the working chamber on the ion charge state of combined metal (Ti) and gas-discharge (N) plasma is considered. | ||
| 333 | _aРежим доступа: по договору с организацией-держателем ресурса | ||
| 461 | _tReview of Scientific Instruments | ||
| 463 |
_tVol. 85, iss. 2 _v[02A733, 3 p.] _d2014 |
||
| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 701 | 1 |
_aStepanov _bI. B. _cphysicist _cHead of the laboratory of Tomsk Polytechnic University, Doctor of technical sciences _f1968- _gIgor Borisovich _2stltpush _3(RuTPU)RU\TPU\pers\34218 |
|
| 701 | 1 |
_aRyabchikov _bA. I. _cProfessor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences _cphysicist _f1950- _gAleksandr Ilyich _2stltpush _3(RuTPU)RU\TPU\pers\30912 |
|
| 701 | 1 |
_aAnanin _bP. S. _cphysicist _csenior researcher of Tomsk Polytechnic University, candidate of physical and mathematical sciences _f1942- _gPetr Semenovich _2stltpush _3(RuTPU)RU\TPU\pers\35673 |
|
| 701 | 1 |
_aDektyarev _bS. V. _cphysicist _cdesign engineer of Tomsk Polytechnic University _f1957- _gSergey Valentinovich _2stltpush _3(RuTPU)RU\TPU\pers\35672 |
|
| 701 | 1 |
_aSivin _bD. O. _cphysicist _cSenior researcher of Tomsk Polytechnic University, Candidate of technical sciences _f1978- _gDenis Olegovich _2stltpush _3(RuTPU)RU\TPU\pers\34240 |
|
| 701 | 1 |
_aVerigin _bD. A. _cphysicist _cSenior Lecturer of Tomsk Polytechnic University _f1984- _gDan Aleksandrovich _2stltpush _3(RuTPU)RU\TPU\pers\31211 |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет (ТПУ) _bФизико-технический институт (ФТИ) _bКафедра прикладной физики (№ 12) (ПФ) _h46 _2stltpush _3(RuTPU)RU\TPU\col\18729 |
| 801 | 2 |
_aRU _b63413507 _c20191106 _gRCR |
|
| 856 | 4 | _uhttp://dx.doi.org/10.1063/1.4852219 | |
| 942 | _cCF | ||