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005 20231030040946.0
035 _a(RuTPU)RU\TPU\network\15656
035 _aRU\TPU\network\15655
090 _a650438
100 _a20161006a2016 k y0engy50 ba
101 0 _aeng
102 _aGB
105 _ay z 100zy
135 _adrgn ---uucaa
181 0 _ai
182 0 _ab
200 1 _aSynthis and Phisical And Chemical; Properties of SiO[2]-B[2]O[3] and SiO[2]-P[2]O[5] Thin Film Systems and Powders
_fA. G. Malchik [et al.]
203 _aText
_celectronic
300 _aTitle screen
320 _a[References: 10 tit.]
330 _aThe SiO[2]-B[2]O[3] and SiO[2]-P[2]O[5] films were synthesized by using film forming solutions having a P[2]O[5] content of up to 30% and B[2]O[3] up to 40%. Properties of the filmforming solutions and binary oxides were examined. The physical and chemical processes occurring in the solution during the heat treatment of films were examined. The conditions for producing films of different thicknesses were determined. The kinetic parameters were calculated.
461 0 _0(RuTPU)RU\TPU\network\2008
_tIOP Conference Series: Materials Science and Engineering
463 0 _0(RuTPU)RU\TPU\network\15319
_tVol. 142 : Innovative Technologies in Engineering
_oVII International Scientific Practical Conference, 19–21 May 2016, Yurga, Russian Federation
_o[proceedings]
_v[012066, 8 p.]
_d2016
610 1 _aэлектронный ресурс
610 1 _aтруды учёных ТПУ
610 1 _aсинтез
610 1 _aфизико-химические свойства
610 1 _aтонкопленочные системы
610 1 _aпорошки
610 1 _aбинарные окисные системы
610 1 _aсиликатные материалы
610 1 _aтонкопленочные материалы
610 1 _aгидрофобные покрытия
701 1 _aMalchik
_bA. G.
_cspecialist in the field of ecology and life safety
_cAssociate Professor of Yurga technological Institute of Tomsk Polytechnic University, candidate of technical sciences
_f1970-
_gAleksandra Gennadievna
_2stltpush
_3(RuTPU)RU\TPU\pers\34721
701 1 _aLitovkin
_bS. V.
_cspecialist in the field of ecology and life safety
_cassistant of Yurga technological Institute of Tomsk Polytechnic University
_f1985-
_gSergey Valerievich
_2stltpush
_3(RuTPU)RU\TPU\pers\35617
701 1 _aSeregin
_bV. I.
701 1 _aRodionov
_bP. V.
_cspecialist in the field of ecology and life safety
_csenior lecturer of Yurga technological Institute of Tomsk Polytechnic University
_f1972-
_gPavel Vadimovich
_2stltpush
_3(RuTPU)RU\TPU\pers\35616
701 1 _aKryuchkova
_bS. О.
712 0 2 _aНациональный исследовательский Томский политехнический университет (ТПУ)
_bЮргинский технологический институт (филиал) (ЮТИ)
_bКафедра безопасности жизнедеятельности, экологии и физического воспитания (БЖДЭФВ)
_h2240
_2stltpush
_3(RuTPU)RU\TPU\col\18930
801 2 _aRU
_b63413507
_c20170120
_gRCR
856 4 _uhttp://dx.doi.org/10.1088/1757-899X/142/1/012066
856 4 _uhttp://earchive.tpu.ru/handle/11683/34750
942 _cCF