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100 _a20161205a2016 k y0engy50 ba
101 0 _aeng
135 _adrcn ---uucaa
181 0 _ai
182 0 _ab
200 1 _aTiO2 nanoparticle detection by means of laser beam scattering in a hollow cathode plasma jet
_fR. V. Perekrestov [et al.]
203 _aText
_celectronic
300 _aTitle screen
320 _a[References: 37 tit.]
330 _aThe distribution of TiO2 nanoparticles in a plasma plume of a hollow cathode plasma jet is being studied in this work. The method is based on the detection of light from a laser beam scattered on nanoparticles by three detectors: a photodiode, an optical spectrometer and a digital photo camera. The Rayleigh–Mie theory was used as a basis for the description of the results. Two lasers with wavelengths of 446 and 661?nm were used as light sources. 2D maps of the scattered light intensity were assembled from photo camera pictures at different discharge parameters. Dependencies of the signal intensity on the O2 flow rate and wavelength are discussed. Direct measurements of particle size on the substrate were carried out by means of a scanning electron microscope in order to verify the agreement of results with the theory. Aside from nanoparticles we detected TiO2 columnar structures in the deposited samples. Crystalline structure of the samples was investigated using x-ray diffraction analysis.
333 _aРежим доступа: по договору с организацией-держателем ресурса
461 _tJournal of Physics D: Applied Physics
_d1950-
463 _tVol. 49, iss. 26
_v[11 p., 265201]
_d2016
610 1 _aэлектронный ресурс
610 1 _aтруды учёных ТПУ
610 1 _aнаночастицы
610 1 _aоксид титана
610 1 _aлазерные лучи
610 1 _aплазменные струи
701 1 _aPerekrestov
_bR. V.
_gRoman Vyacheslavovich
701 1 _aKudrna
_bP.
701 1 _aTychi
_bM.
_gMilan
701 1 _aKhalakhan
_bI.
_gIvan
701 1 _aMyshkin (Mishkin)
_bV. F.
_cPhysicist
_cProfessor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences
_f1962-
_gVyacheslav Fedorovich
_2stltpush
_3(RuTPU)RU\TPU\pers\31492
712 0 2 _aНациональный исследовательский Томский политехнический университет (ТПУ)
_bФизико-технический институт (ФТИ)
_bКафедра технической физики (№ 23) (ТФ)
_h52
_2stltpush
_3(RuTPU)RU\TPU\col\18732
801 2 _aRU
_b63413507
_c20161207
_gRCR
856 4 _uhttp://dx.doi.org/10.1088/0022-3727/49/26/265201
942 _cCF