| 000 | 03188nla2a2200433 4500 | ||
|---|---|---|---|
| 001 | 652764 | ||
| 005 | 20231030041153.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\18102 | ||
| 035 | _aRU\TPU\network\18084 | ||
| 090 | _a652764 | ||
| 100 | _a20170125a2016 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 105 | _ay z 100zy | ||
| 135 | _adrcn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aNon-Isothermal Model of Ion Implantation with Combined Ion Beam _fE. S. Parfenova, A. G. Knyazeva |
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| 203 |
_aText _celectronic |
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| 300 | _aTitle screen | ||
| 320 | _a[References: 13 tit.] | ||
| 330 | _aThe paper presents a coupling non-isothermal mathematical model of the initial stage of ion implantation into a metal surface. The model takes into account the finiteness of relaxation times of heat and mass fluxes, the presence of stresses and strains arising as a result of particle impact on the substrate surface and due to phenomena of heat and concentration expansion. The model assumes that the ion beam consists of two different components with different relaxation time and diffusion coefficients. The mathematical model was solved numerically. Some investigation results were presented. | ||
| 333 | _aРежим доступа: по договору с организацией-держателем ресурса | ||
| 461 | 0 |
_0(RuTPU)RU\TPU\network\4816 _tAIP Conference Proceedings |
|
| 463 | 0 |
_0(RuTPU)RU\TPU\network\17851 _tVol. 1783 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2016 _oProceedings of the International conference, 19–23 September 2016, Tomsk, Russia _fNational Research Tomsk Polytechnic University (TPU); eds. V. E. Panin ; S. G. Psakhie ; V. M. Fomin _v[020184, 4 p.] _d2016 |
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| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aионная имплантация | |
| 610 | 1 | _aионные пучки | |
| 610 | 1 | _aматематические модели | |
| 610 | 1 | _aметаллические поверхности | |
| 610 | 1 | _aдеформации | |
| 610 | 1 | _aподложки | |
| 610 | 1 | _aкоэффициент диффузии | |
| 700 | 1 |
_aParfenova _bE. S. _cChemical Engineer _cengineer of Tomsk Polytechnic University _f1989- _gElena Sergeevna _2stltpush _3(RuTPU)RU\TPU\pers\34500 |
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| 701 | 1 |
_aKnyazeva _bA. G. _cRussian physicist _cProfessor of Tomsk Polytechnic University, doctor of physico-mathematical Sciences _f1962- _gAnna Georgievna _2stltpush _3(RuTPU)RU\TPU\pers\32712 |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет (ТПУ) _bИнститут физики высоких технологий (ИФВТ) _bУчебно-научная межотраслевая междисциплинарная лаборатория "Моделирование физико-химических процессов в современных технологиях" (УНММЛ "МФХПСТ") _h6383 _2stltpush _3(RuTPU)RU\TPU\col\19311 |
| 801 | 2 |
_aRU _b63413507 _c20170125 _gRCR |
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| 856 | 4 | _uhttp://dx.doi.org/10.1063/1.4966478 | |
| 942 | _cCF | ||