| 000 | 02900nla2a2200481 4500 | ||
|---|---|---|---|
| 001 | 655455 | ||
| 005 | 20231030041345.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\21584 | ||
| 035 | _aRU\TPU\network\21016 | ||
| 090 | _a655455 | ||
| 100 | _a20170905a2017 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 105 | _ay z 100zy | ||
| 135 | _adrgn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aThe Mathematical Modeling of the Initial Stage of Ion Implantation into the Target with Coating _fE. S. Parfenova |
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| 203 |
_aText _celectronic |
||
| 300 | _aTitle screen | ||
| 330 | _aThe paper presents a non-isothermal model of the initial stage of ion implantation process. The model takes into account the existence of internal interfaces. The model assumes that the implantable impurity generates mechanical perturbations. These disturbances can propagate at different speeds before and after internal boundary. The examples of the waveform evolution in transition across the border are shown. | ||
| 333 | _aРежим доступа: по договору с организацией-держателем ресурса | ||
| 461 | 0 |
_0(RuTPU)RU\TPU\network\11477 _tKey Engineering Materials _oScientific Journal |
|
| 463 | 0 |
_0(RuTPU)RU\TPU\network\21014 _tVol. 743 : High Technology: Research and Applications (HTRA 2016) _oThe V International Science and Engineering Conference, Decembe 5-7, 2016, Tomsk, Russia _o[proceedings] _fNational Research Tomsk Polytechnic University (TPU) ; eds. G. E. Osokin ; E. A. Kulinich _v[P. 138-141] _d2017 |
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| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aпокрытия | |
| 610 | 1 | _aупругие волны | |
| 610 | 1 | _aдеформации | |
| 610 | 1 | _aдиффузии | |
| 610 | 1 | _aматематические модели | |
| 610 | 1 | _aионная имплантация | |
| 610 | 1 | _aмишени | |
| 610 | 1 | _acoating | |
| 610 | 1 | _adeformation | |
| 610 | 1 | _adiffusion | |
| 610 | 1 | _aelastic wave | |
| 610 | 1 | _amathematical model | |
| 610 | 1 | _astress | |
| 700 | 1 |
_aParfenova _bE. S. _cChemical Engineer _cengineer of Tomsk Polytechnic University _f1989- _gElena Sergeevna _2stltpush _3(RuTPU)RU\TPU\pers\34500 |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет (ТПУ) _bИнститут физики высоких технологий (ИФВТ) _bУчебно-научная межотраслевая междисциплинарная лаборатория "Моделирование физико-химических процессов в современных технологиях" (УНММЛ "МФХПСТ") _h6383 _2stltpush _3(RuTPU)RU\TPU\col\19311 |
| 801 | 2 |
_aRU _b63413507 _c20170905 _gRCR |
|
| 856 | 4 | _uhttp://dx.doi.org/10.4028/www.scientific.net/KEM.743.138 | |
| 942 | _cCF | ||