| 000 | 01995nlm1a2200409 4500 | ||
|---|---|---|---|
| 001 | 655666 | ||
| 005 | 20231030041355.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\21925 | ||
| 035 | _aRU\TPU\network\1681 | ||
| 090 | _a655666 | ||
| 100 | _a20170921a2002 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 102 | _aUS | ||
| 135 | _adrnn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aModel of the Anode Layer of a Magnetron Discharge _fD. S. Rytchkov, V. P. Krivobokov, D. A. Marakassov |
|
| 203 |
_aText _celectronic |
||
| 300 | _aTitle screen | ||
| 320 | _a[Ref.: p. 1066 (14 tit.)] | ||
| 330 | _aThe anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed. | ||
| 333 | _aРежим доступа: по договору с организацией-держателем ресурса | ||
| 461 | _tRussian Physics Journal | ||
| 463 |
_tVol. 45, iss. 11 _v[С. 1066-1074] _d2002 |
||
| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aплазма | |
| 610 | 1 | _aраспылительные системы | |
| 610 | 1 | _aтоки | |
| 610 | 1 | _aмодели | |
| 610 | 1 | _aприменение | |
| 700 | 1 |
_aRytchkov _bD. S. |
|
| 701 | 1 |
_aKrivobokov _bV. P. _cRussian physicist _cprofessor of Tomsk Polytechnic University (TPU), Doctor of Physical and Mathematical Sciences (DSc) _f1948- _gValery Pavlovich _2stltpush _3(RuTPU)RU\TPU\pers\30416 |
|
| 701 | 1 |
_aMarakassov _bD. A. |
|
| 801 | 2 |
_aRU _b63413507 _c20170921 _gRCR |
|
| 856 | 4 | _uhttp://dx.doi.org/10.1023/A:1023391406689 | |
| 942 | _cCF | ||