| 000 | 02652nlm0a2200409 4500 | ||
|---|---|---|---|
| 001 | 656285 | ||
| 005 | 20231030041421.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\22726 | ||
| 035 | _aRU\TPU\network\11354 | ||
| 090 | _a656285 | ||
| 100 | _a20171107d2015 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 102 | _aCZ | ||
| 105 | _aa z 100zy | ||
| 135 | _adrcn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aMetrological performance of integrated multiple axis MEMS accelerometers under thermal effect _fT. G. Nesterenko [et al.] |
|
| 203 |
_aText _celectronic |
||
| 300 | _aTitle screen | ||
| 320 | _a[References: 12 tit.] | ||
| 330 | _aMicroelectromechanical system (MEMS) accelerometers are widely used for the measurement of acceleration, tilt, vibration, and shock in moving objects. MEMS-based accelerometers are rather sensitive to the temperature changes. The paper presents the dependence between the temperature changes and metrological performance of MEMS-based accelerometer. Methods of the temperature compensation are considered in this paper. | ||
| 463 |
_tMeasurement in Research and Industry _oXXI IMEKO World Congress, 30 August - 4 September 2015, Prague, Czech Republic _v[5 р.] _oproceedings _d2015 |
||
| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aМЭМС-акселерометры | |
| 610 | 1 | _aупругие подвески | |
| 610 | 1 | _aдвижущиеся массы | |
| 610 | 1 | _aтемпературная чувствительность | |
| 701 | 1 |
_aNesterenko _bT. G. _cspecialist in the field of mechanical engineering _cAssociate Professor of Tomsk Polytechnic University, Candidate of technical sciences _f1946- _gTamara Georgievna _2stltpush _3(RuTPU)RU\TPU\pers\30970 |
|
| 701 | 1 |
_aBarbin _bE. S. _cspecialist in the field of instrument engineering _cengineer of Tomsk Polytechnic University _f1988- _gEvgeny Sergeevich _2stltpush _3(RuTPU)RU\TPU\pers\36470 |
|
| 701 | 1 |
_aKoleda _bA. N. _cSpecialist in the field of instrument making _cEngineer of Tomsk Polytechnic University _f1985- _gAleksey Nikolaevich _2stltpush _3(RuTPU)RU\TPU\pers\33286 |
|
| 701 | 1 |
_aArshinova _bA. A. _gAlisa A. |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет (ТПУ) _bИнститут неразрушающего контроля (ИНК) _bКафедра точного приборостроения (ТПС) _h63 _2stltpush _3(RuTPU)RU\TPU\col\18717 |
| 801 | 2 |
_aRU _b63413507 _c20180221 _gRCR |
|
| 856 | 4 | _uhttp://www.imeko.org/publications/wc-2015/IMEKO-WC-2015-TC22-435.pdf | |
| 942 | _cCF | ||