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100 _a20190204a2018 k y0engy50 ba
101 0 _aeng
102 _aUS
135 _adrcn ---uucaa
181 0 _ai
182 0 _ab
200 1 _aHigh intensity, macroparticle-free, aluminum ion beam formation
_fA. I. Ryabchikov [et al.]
203 _aText
_celectronic
300 _aTitle screen
320 _a[References: 37 tit.]
330 _aWe describe a vacuum arc based system for the generation of repetitively pulsed metal ion beams with very high current density, and the results of experimental investigations of the performance of this new system, as well as the results of numerical simulations. Our approach uses a DC vacuum arc as a metal plasma source, and the beam-forming technique is a hybrid method using features of conventional gridded ion extraction together with some plasma immersion attributes. A hemispherical grid is located some distance from the plasma source so as to intercept part of the metal plasma flow and repetitively pulse-biased to the requisite ion beam energy. Ions are accelerated in the high voltage sheath that forms in front of the biased grid and focused into a converging beam that can be of a very high current density. Space charge neutralization is provided by cold plasma that streams through the grid during the bias-off part of the cycle. At the same time, macroparticles in the vacuum arc plasma are blocked from viewing the target by a metal disk positioned centrally on the hemispherical grid. In the work outlined here, we formed 5?keV aluminum ion beams with a current density up to 470?mA/cm2 at a negative bias amplitude of 3?kV and a pulse repetition rate of 105 pulse per second. The experiments and numerical simulations demonstrate the formation of high-intensity macroparticle-free aluminum ion beams for material surface modification and other possible applications.
333 _aРежим доступа: по договору с организацией-держателем ресурса
461 _tJournal of Applied Physics
463 _tVol. 123, iss. 23
_v[233301, 11 p.]
_d2018
610 1 _aэлектронный ресурс
610 1 _aтруды учёных ТПУ
701 1 _aRyabchikov
_bA. I.
_cProfessor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences
_cphysicist
_f1950-
_gAleksandr Ilyich
_2stltpush
_3(RuTPU)RU\TPU\pers\30912
701 1 _aShevelev
_bA. E.
_cPhysicist
_cEngineer of Tomsk Polytechnic University
_f1990-
_gAleksey Eduardovich
_2stltpush
_3(RuTPU)RU\TPU\pers\36832
701 1 _aSivin
_bD. O.
_cphysicist
_cSenior researcher of Tomsk Polytechnic University, Candidate of technical sciences
_f1978-
_gDenis Olegovich
_2stltpush
_3(RuTPU)RU\TPU\pers\34240
701 1 _aKoval
_bT. V.
_cmathematician, physicist
_cProfessor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences
_f1953-
_gTamara Vasilievna
_2stltpush
_3(RuTPU)RU\TPU\pers\34227
701 0 _aChan My Kim An
_cspecialist in the field of informatics and computer technology
_cResearch Engineer of Tomsk Polytechnic University
_f1988-
_2stltpush
_3(RuTPU)RU\TPU\pers\42959
712 0 2 _aНациональный исследовательский Томский политехнический университет
_bИнженерная школа ядерных технологий
_bНаучная лаборатория высокоинтенсивной имплантации ионов
_h7868
_2stltpush
_3(RuTPU)RU\TPU\col\23698
712 0 2 _aНациональный исследовательский Томский политехнический университет
_bИнженерная школа информационных технологий и робототехники
_bОтделение информационных технологий
_h7951
_2stltpush
_3(RuTPU)RU\TPU\col\23515
801 2 _aRU
_b63413507
_c20190204
_gRCR
856 4 _uhttps://doi.org/10.1063/1.5034082
942 _cCF