| 000 | 02608nlm2a2200397 4500 | ||
|---|---|---|---|
| 001 | 660990 | ||
| 005 | 20231030041730.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\31194 | ||
| 035 | _aRU\TPU\network\30899 | ||
| 090 | _a660990 | ||
| 100 | _a20191114a2019 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 102 | _aGB | ||
| 105 | _ay z 100zy | ||
| 135 | _adrcn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aEffect of working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target _fA. Yu. Fedotkin, A. I. Kozelskaya, S. I. Tverdokhlebov |
|
| 203 |
_aText _celectronic |
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| 300 | _aTitle screen | ||
| 320 | _a[References: 7 tit.] | ||
| 330 | _aThis study is dedicated to the influence of the inert working gas on the deposition rate of CaP coatings formed by radio frequency magnetron sputtering of a hydroxyapatite target in Ar, Kr and Xe. The optical emission spectra of plasma, the elemental and phase composition of the formed coatings are investigated. The deposition rates of the CaP coatings formed in Ar and Kr are approximately comparable and higher than ones formed in Xe. | ||
| 461 | 0 |
_0(RuTPU)RU\TPU\network\3526 _tJournal of Physics: Conference Series |
|
| 463 |
_tVol. 1313 : 26th International Conference on Vacuum Technique and Technology _o18–20 June 2019, Saint Petersburg, Russian Federation _v[012018, 4 р.] _d2019 |
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| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aскорости | |
| 610 | 1 | _aосаждение | |
| 610 | 1 | _aрабочий газ | |
| 700 | 1 |
_aFedotkin _bA. Yu. _cphysicist _cengineer of Tomsk Polytechnic University _f1994- _gAleksandr Yurjevich _2stltpush _3(RuTPU)RU\TPU\pers\44107 |
|
| 701 | 1 |
_aKozelskaya _bA. I. _cphysicist _cAssistant of Tomsk Polytechnic University, Candidate of physical and mathematical sciences _f1985- _gAnna Ivanovna _2stltpush _3(RuTPU)RU\TPU\pers\39663 |
|
| 701 | 1 |
_aTverdokhlebov _bS. I. _cphysicist _cAssociate Professor of Tomsk Polytechnic University, Candidate of physical and mathematical science _f1961- _gSergei Ivanovich _2stltpush _3(RuTPU)RU\TPU\pers\30855 |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет _bИнженерная школа ядерных технологий _bНаучно-образовательный центр Б. П. Вейнберга _h7866 _2stltpush _3(RuTPU)RU\TPU\col\23561 |
| 801 | 2 |
_aRU _b63413507 _c20191114 _gRCR |
|
| 856 | 4 | _uhttps://doi.org/10.1088/1742-6596/1313/1/012018 | |
| 942 | _cCF | ||