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181 0 _ai
182 0 _ab
200 1 _aUltra high fluence implantation of aluminum ions into CP–Ti
_fA. I. Ryabchikov [et al.]
203 _aText
_celectronic
300 _aTitle screen
320 _a[References: 43 tit.]
330 _aThis study describes the possibility of ultra-high fluence low ion energy aluminum implantation for surface modification of titanium. The DC vacuum arc source was used to produce dense metal plasma. Plasma immersion aluminum ions extraction and their ballistic focusing in equipotential space of negatively biased hemispherical electrode were used to obtain high-intensity aluminum ion beam with the maximum amplitude of 0.6?A?at the ion current density up to 200?mA/cm2. The original filtration system was used to prevent the deposition of vacuum arc aluminum macroparticles onto the irradiated area of titanium sample. Aluminum low energy ions (mean ion energy 2.6?keV) were implanted into titanium with the fluences reaching 1021?ion/cm2. The effect of substrate temperature, ion current density on the phase composition, microstructure and elemental distribution was studied by X-ray diffraction, scanning electron microscopy, glow-discharge optical emission spectroscopy and transmission electron microscopy. The results show the appearance of Ti3Al intermetallic phase after Al implantation. The depth of aluminum penetration into titanium increases with the substrate temperature and multiply exceeds the projected ranges of ions of given energies and reaches several dozens of μm.
333 _aРежим доступа: по договору с организацией-держателем ресурса
461 _tJournal of Alloys and Compounds
463 _tVol. 793
_v[P. 604-612]
_d2019
610 1 _aэлектронный ресурс
610 1 _aтруды учёных ТПУ
610 1 _aion implantation
610 1 _aintermetallic
610 1 _alow-energy ion beams
610 1 _atitanium
610 1 _aaluminum
610 1 _aионная имплантация
610 1 _aионные пучки
610 1 _aтитан
610 1 _aалюминий
701 1 _aRyabchikov
_bA. I.
_cProfessor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences
_cphysicist
_f1950-
_gAleksandr Ilyich
_2stltpush
_3(RuTPU)RU\TPU\pers\30912
701 1 _aShevelev
_bA. E.
_cPhysicist
_cEngineer of Tomsk Polytechnic University
_f1990-
_gAleksey Eduardovich
_2stltpush
_3(RuTPU)RU\TPU\pers\36832
701 1 _aSivin
_bD. O.
_cphysicist
_cSenior researcher of Tomsk Polytechnic University, Candidate of technical sciences
_f1978-
_gDenis Olegovich
_2stltpush
_3(RuTPU)RU\TPU\pers\34240
701 1 _aBozhko
_bI. A.
_cphysicist
_cAssociate Professor of Tomsk Polytechnic University, Candidate of physical and mathematical sciences
_f1980-
_gIrina Aleksandrovna
_2stltpush
_3(RuTPU)RU\TPU\pers\34206
701 1 _aKashkarov
_bE. B.
_cPhysicist
_cAssociate Scientist of Tomsk Polytechnic University, Assistant
_f1991-
_gEgor Borisovich
_2stltpush
_3(RuTPU)RU\TPU\pers\34949
701 1 _aBleykher (Bleicher)
_bG. A.
_cphysicist
_cProfessor of Tomsk Polytechnic University, Doctor of Physical and Mathematical Sciences
_f1961-
_gGalina Alekseevna
_2stltpush
_3(RuTPU)RU\TPU\pers\31496
701 1 _aStepanov
_bI. B.
_cphysicist
_cHead of the laboratory of Tomsk Polytechnic University, Doctor of technical sciences
_f1968-
_gIgor Borisovich
_2stltpush
_3(RuTPU)RU\TPU\pers\34218
701 1 _aIvanova
_bA. I.
_cphysicist
_cAssociate Scientist of Tomsk Polytechnic University
_f1987-
_gAnna Ivanovna
_2stltpush
_3(RuTPU)RU\TPU\pers\36986
712 0 2 _aНациональный исследовательский Томский политехнический университет
_bИнженерная школа новых производственных технологий
_bОтделение материаловедения
_h7871
_2stltpush
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712 0 2 _aНациональный исследовательский Томский политехнический университет
_bИнженерная школа ядерных технологий
_bОтделение экспериментальной физики
_h7865
_2stltpush
_3(RuTPU)RU\TPU\col\23549
712 0 2 _aНациональный исследовательский Томский политехнический университет
_bИнженерная школа ядерных технологий
_bНаучная лаборатория высокоинтенсивной имплантации ионов
_h7868
_2stltpush
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712 0 2 _aНациональный исследовательский Томский политехнический университет
_bИнженерная школа ядерных технологий
_bНаучно-образовательный центр Б. П. Вейнберга
_h7866
_2stltpush
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801 2 _aRU
_b63413507
_c20191125
_gRCR
856 4 _uhttps://doi.org/10.1016/j.jallcom.2019.04.179
942 _cCF