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100 _a20191226a2019 k y0engy50 ba
101 0 _aeng
105 _ay z 100zy
135 _adrcn ---uucaa
181 0 _ai
182 0 _ab
200 1 _aThe Study of the Structural Phase State and Properties of Impact Resistant Zr-Y-O Coatings Systems on Si Substrates
_fI. A. Bozhko [et al.]
203 _aText
_celectronic
300 _aTitle screen
320 _a[References: 4 tit.]
330 _aThe results of studies of the microstructure, phase composition, physical and mechanical properties of coatings of the Zr-Y-O system with a thickness of 3 [mu]m on single-crystal Si substrates produced by pulsed magnetron deposition are presented. The results of the laboratory tests of the impact resistance of the silicon samples with protective coatings of the Zr-Y-O system to shock loads, during the interaction of a stream of Fe microparticles moving at a speed of 5 km/s. are given. According to the data of X-ray and TEM, it was establisheded that the composite coatings of the Zr-Y-O system had a submicrocrystalline columnar structure (dav=46-200 nm) and contain the ZrO[2] phase in the monoclinic and tetragonal modifications. The study of the optical properties of the samples has shown that the coefficient of light transmission for these coatings varies from 70 to 80% in the wavelength range of 400-800 nm. It has been found that the application of the protective coatings of the Zr-Y-O system with a thickness of 3 [mu]m on the surface of the silicon samples leads to increasing in their microhardness from 14 to 19 GPa. Under laboratory conditions, shock tests have shown that the application of these protective coatings of the Zr-Y-O system allow suppressing the processes of erosion in the latter. This is due to the prevention of the formation of small craters, whose size does not exceed 30 [mu]m, as well as due to a considerable decrease in the number of the craters with size from 30 to 50 [mu]m.
333 _aРежим доступа: по договору с организацией-держателем ресурса
461 0 _0(RuTPU)RU\TPU\network\4816
_tAIP Conference Proceedings
463 0 _0(RuTPU)RU\TPU\network\31884
_tVol. 2167 : Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2019 (AMHS'19)
_oProceedings of the International Conference, 1–5 October 2019, Tomsk, Russia
_fNational Research Tomsk Polytechnic University (TPU) ; Institute of Strength Physics and Materials Science SB RAS (Russia) ; eds. V. E. Panin ; S. G. Psakhie ; V. M. Fomin
_v[020038, 4 p.]
_d2019
610 1 _aэлектронный ресурс
610 1 _aтруды учёных ТПУ
610 1 _aструктурно-фазовые состояния
610 1 _aпокрытия
610 1 _aподложки
610 1 _aфизико-механические свойства
610 1 _aмонокристаллический кремний
610 1 _aмагнетронное осаждение
610 1 _aзащитные покрытия
610 1 _aоптические свойства
701 1 _aBozhko
_bI. A.
_cphysicist
_cAssociate Professor of Tomsk Polytechnic University, Candidate of physical and mathematical sciences
_f1980-
_gIrina Aleksandrovna
_2stltpush
_3(RuTPU)RU\TPU\pers\34206
701 1 _aKalashnikov
_bM. P.
_cphysicist
_cEngineer of Tomsk Polytechnic University
_gMark Petrovich
_2stltpush
_3(RuTPU)RU\TPU\pers\33561
701 1 _aFedorishcheva
_bM. V.
_cphysicist
_cAssociate Professor of Tomsk Polytechnic University, candidate of physical and mathematical sciences
_f1958-
_gMarina Vladimirovna
_2stltpush
_3(RuTPU)RU\TPU\pers\35812
701 1 _aSergeev
_bV. P.
_cspecialist in the field of materials science
_cProfessor of Tomsk Polytechnic University, doctor of technical Sciences
_f1949-
_gViktor Petrovich
_2stltpush
_3(RuTPU)RU\TPU\pers\32730
712 0 2 _aНациональный исследовательский Томский политехнический университет
_bИнженерная школа новых производственных технологий
_bОтделение материаловедения
_h7871
_2stltpush
_3(RuTPU)RU\TPU\col\23508
801 2 _aRU
_b63413507
_c20191226
_gRCR
856 4 _uhttps://doi.org/10.1063/1.5131905
942 _cCF