| 000 | 03761nlm1a2200433 4500 | ||
|---|---|---|---|
| 001 | 661650 | ||
| 005 | 20231030041754.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\32374 | ||
| 090 | _a661650 | ||
| 100 | _a20200127a2020 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 135 | _adrcn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aPlasma-Chemical Deposition of Anti-Reflection and Protective Coating for Infrared Optics _dПлазмохимическое осаждение антиотражающего и защитного покрытия для ИК-оптики _fA. S. Grenaderov, K. V. Oskomov, A. A. Soloviev (Solovyev) [et al.] |
|
| 203 |
_aText _celectronic |
||
| 300 | _aTitle screen | ||
| 320 | _a[References: 21 tit.] | ||
| 330 | _aThe films of amorphous hydrogenated carbon doped with Si and O were deposited onto the sample of crystalline silicon by method of plasma-chemical deposition in the mix of polyphenyl methylsiloxane vapors and argon. Physico-mechanical and optical properties of films were examined for their use as anti-reflection and protective coatings in infrared optics devices. Film transparency in the wavelength range of 2.5-8 μm was measured by method of infrared spectroscopy with a Fourier transform. The structure and composition of films were studied by methods of Raman and X-ray photoelectron spectroscopy. Hardness and other mechanical properties of films were determined by nanoindentation. It was shown that the double-sided deposition of a-C:H:SiOx films onto Si plates allows increasing their integrated transmission in the wavelength region of 3- 5 μm from 50 to 87%. The films possess excellent mechanical characteristics, thermal stability in the temperature range from room temperature to 500°С, and resistance to aqueous solutions of salt. | ||
| 333 | _aРежим доступа: по договору с организацией-держателем ресурса | ||
| 461 | _tRussian Physics Journal | ||
| 463 |
_tVol. 62, iss. 11 _v[P. 2112-2120] _d2020 |
||
| 510 | 1 |
_aПлазмохимическое осаждение антиотражающего и защитного покрытия для ИК-оптики _zrus |
|
| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aanti-reflection coatings | |
| 610 | 1 | _aprotective coatings | |
| 610 | 1 | _ainfrared optics | |
| 610 | 1 | _aplasma-chemical synthesis | |
| 701 | 1 |
_aGrenaderov _bA. S. _gAleksandr Sergeevich |
|
| 701 | 1 |
_aOskomov _bK. V. _gKonstantin Vladimirovich |
|
| 701 | 1 |
_aSoloviev (Solovyev) _bA. A. _cspecialist in the field of hydrogen energy _cAssociate Professor of Tomsk Polytechnic University, Candidate of technical sciences _f1977- _gAndrey Aleksandrovich _2stltpush _3(RuTPU)RU\TPU\pers\30863 |
|
| 701 | 1 |
_aSelivanova _bA. V. _gAleksandra Viktorovna |
|
| 701 | 1 |
_aKonishchev _bM. E. _cphysicist _cengineer of Tomsk Polytechnic University, post graduate _f1987- _gMaksim Evgenievich _2stltpush _3(RuTPU)RU\TPU\pers\34212 |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет _bИнженерная школа ядерных технологий _bНаучно-образовательный центр Б. П. Вейнберга _h7866 _2stltpush _3(RuTPU)RU\TPU\col\23561 |
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет _bИсследовательская школа физики высокоэнергетических процессов _c(2017- ) _h8118 _2stltpush _3(RuTPU)RU\TPU\col\23551 |
| 801 | 2 |
_aRU _b63413507 _c20210121 _gRCR |
|
| 856 | 4 | 0 | _uhttps://doi.org/10.1007/s11182-019-01835-4 |
| 942 | _cCF | ||