| 000 | 03238nlm1a2200505 4500 | ||
|---|---|---|---|
| 001 | 662572 | ||
| 005 | 20231030041825.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\33727 | ||
| 035 | _aRU\TPU\network\33078 | ||
| 090 | _a662572 | ||
| 100 | _a20200904a2019 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 102 | _aUS | ||
| 135 | _adrcn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aGeneration of boron ion beams by vacuum arc and planar magnetron ion sources _fA. V. Bugaev, V. P. Frolova, V. I. Gushenets [et al.] |
|
| 203 |
_aText _celectronic |
||
| 300 | _aTitle screen | ||
| 320 | _a[References: 20 tit.] | ||
| 330 | _aBoron ions can be implanted not only in semiconductors such as silicon wafers but also in other materials and metal products, e.g., machine parts and tools, to increase their surface properties and therefore lifetime. The purity of boron ion beams for these purposes is not so critical as for semiconductor technologies. Here, we present experimental results on the generation of pulsed boron ion beams in vacuum arc and planar magnetron ion sources with pure boron and lanthanum hexaboride cathodes with emphasis on the mass-charge state composition of the ion beams. | ||
| 333 | _aРежим доступа: по договору с организацией-держателем ресурса | ||
| 461 | _tReview of Scientific Instruments | ||
| 463 |
_tVol. 90, iss. 10 _v[103302, 4 p.] _d2019 |
||
| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aгенерация | |
| 610 | 1 | _aионы бора | |
| 610 | 1 | _aвакуумные дуги | |
| 610 | 1 | _aпланарные технологии | |
| 701 | 1 |
_aBugaev _bA. V. _gAleksey Vladimirovich |
|
| 701 | 1 |
_aFrolova _bV. P. _gValeriya Petrovna |
|
| 701 | 1 |
_aGushenets _bV. I. _gVasily Ivanovich |
|
| 701 | 1 |
_aNikolaev _bA. G. _gAleksey Gennadjevich |
|
| 701 | 1 |
_aOks _bE. M. _gEfim Mikhaylovich |
|
| 701 | 1 |
_aSavkin _bK. P. _gKonstantin Petrovich |
|
| 701 | 1 |
_aShandrikov _bM. V. _gMaksim Valentinovich |
|
| 701 | 1 |
_aVizir _bA. _gAlexey |
|
| 701 | 1 |
_aYushkov _bA. Yu. _cspecialist in the field of electricity _cassociate Professor of Tomsk Polytechnic University, candidate of technical Sciences _f1975- _gAnatoly Yurievich _2stltpush _3(RuTPU)RU\TPU\pers\35549 |
|
| 701 | 1 |
_aКадлубович _bБ. Е. _cспециалист в области ядерных технологий _cдоцент Томского политехнического университета, кандидат физико-математических наук, директор центра управления контингентом студентов _f1965- _gБорис Евгеньевич _2stltpush _3(RuTPU)RU\TPU\pers\26481 |
|
| 701 | 1 |
_aYushkov _bG. Yu. _gGeorgy Yurjevich |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет _bИнженерная школа энергетики _bОтделение электроэнергетики и электротехники (ОЭЭ) _h8022 _2stltpush _3(RuTPU)RU\TPU\col\23505 |
| 801 | 2 |
_aRU _b63413507 _c20200904 _gRCR |
|
| 856 | 4 | _uhttps://doi.org/10.1063/1.5125704 | |
| 942 | _cCF | ||