| 000 | 03774nlm1a2200469 4500 | ||
|---|---|---|---|
| 001 | 663042 | ||
| 005 | 20231030041841.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\34211 | ||
| 035 | _aRU\TPU\network\32374 | ||
| 090 | _a663042 | ||
| 100 | _a20210121a2019 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 135 | _adrcn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aPlasma Chemical Synthesis of Amorphous Hydrocarbon Films Alloyed by Silicon, Oxygen and Nitrogen _fA. S. Grenaderov, K. V. Oskomov, A. A. Solovjev [et al.] |
|
| 203 |
_aText _celectronic |
||
| 300 | _aTitle screen | ||
| 320 | _a[References: 30 tit.] | ||
| 330 | _aThe paper presents the synthesis of amorphous hydrocarbon (a-C:H) films alloyed by silicon, oxygen and nitrogen. The films obtained in polyphenyl methylsiloxane vapor and argon/nitrogen environment are deposited onto crystalline silicon surface using plasma chemical deposition. It is shown that the physical and mechanical properties of the films depend on the nitrogen concentration. The film composition is studied by Xray fluorescence spectrometry and Fourier-transform infrared spectroscopy. Raman spectroscopy is used to explore the film structure. A nanoindenter is used for testing the indentation hardness and other mechanical parameters of the films. It is shown that the chemical composition and properties of a-C:H:SiOx:N film can be maintained by changing the partial nitrogen pressure during the film deposition. The increase in the nitrogen content in a-C:H:SiOx:N film leads to the growth in the root mean square roughness and the contact angle. It also leads to the reduction in the carbon content and the film hardness caused by the lower content of sp3 carbon phase. | ||
| 333 | _aРежим доступа: по договору с организацией-держателем ресурса | ||
| 461 | _tRussian Physics Journal | ||
| 463 |
_tVol. 62, iss. 7 _v[P. 1199-1206] _d2019 |
||
| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aplasma chemical synthesis | |
| 610 | 1 | _aalloyed amorphous doping | |
| 610 | 1 | _aFourier-transform infrared spectroscopy | |
| 610 | 1 | _aRaman spectroscopy | |
| 610 | 1 | _aплазмохимический синтез | |
| 610 | 1 | _aлегирование | |
| 610 | 1 | _aИК-спектроскопия | |
| 701 | 1 |
_aGrenaderov _bA. S. _gAleksandr Sergeevich |
|
| 701 | 1 |
_aOskomov _bK. V. _gKonstantin Vladimirovich |
|
| 701 | 1 |
_aSoloviev (Solovyev) _bA. A. _cspecialist in the field of hydrogen energy _cAssociate Professor of Tomsk Polytechnic University, Candidate of technical sciences _f1977- _gAndrey Aleksandrovich _2stltpush _3(RuTPU)RU\TPU\pers\30863 |
|
| 701 | 1 |
_aIvanova _bN. M. _cphysicist _csenior assistant of Tomsk Polytechnic University _f1991- _gNina Mikhailovna _2stltpush _3(RuTPU)RU\TPU\pers\34210 |
|
| 701 | 1 |
_aSypchenko _bV. S. _cphysicist _cAssociate Scientist of Tomsk Polytechnic University, assistant _f1987- _gVladimir Sergeevich _2stltpush _3(RuTPU)RU\TPU\pers\33791 |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет _bИсследовательская школа физики высокоэнергетических процессов _c(2017- ) _h8118 _2stltpush _3(RuTPU)RU\TPU\col\23551 |
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет _bИнженерная школа ядерных технологий _bОтделение экспериментальной физики _h7865 _2stltpush _3(RuTPU)RU\TPU\col\23549 |
| 801 | 2 |
_aRU _b63413507 _c20210121 _gRCR |
|
| 856 | 4 | 0 | _uhttps://doi.org/10.1007/s11182-019-01835-4 |
| 942 | _cCF | ||