| 000 | 03865nla2a2200457 4500 | ||
|---|---|---|---|
| 001 | 663103 | ||
| 005 | 20231030041843.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\34272 | ||
| 035 | _aRU\TPU\network\34267 | ||
| 090 | _a663103 | ||
| 100 | _a20210125a2020 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 105 | _aa z 101zy | ||
| 135 | _adrcn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aCorrection of the Distribution Profiles of the Intensities of Elements Considering the Uneven Dispersion of the Glow-Discharge Optical Emission Spectrometer for Multilayer Coatings Analysis _fI. A. Shulepov, A. Lomygin, R. S. Laptev [et al.] |
|
| 203 |
_aText _celectronic |
||
| 300 | _aTitle screen | ||
| 320 | _a[References: p. 1159 (13 tit.)] | ||
| 330 | _aMultilayer coatings are of great interest in applications ranging from optical to protective coatings. Several interesting properties of multilayer systems are due to the presence of an unusual structure, multiple boundaries, etc. As with any coating, multilayer systems require material degradation control when used and quality control when coatings are formed. Glow discharge optical emission spectrometry (GD-OES) is one of the methods allowing to resolve ultra-thin layers and have high depth resolution. GD-OES has some problems that affect the research results. One of them is obtaining depth distribution profiles of concentrations in heterogeneous structures. This paper shows the possibility to correct spectra after analysis by taking into account the non-uniformity of atomization due to the presence of instrumental and physical artefacts, as well as using a set of methods GD-OES - EAS (electronic Auger Spectroscopy) to obtain the distribution of concentrations at depth. | ||
| 333 | _aРежим доступа: по договору с организацией-держателем ресурса | ||
| 463 | 0 |
_0(RuTPU)RU\TPU\network\34152 _tEnergy Fluxes and Radiation Effects (EFRE-2020 online) _oproceedings of 7th International Congress, September 14-26, 2020, Tomsk, Russia _fNational Research Tomsk Polytechnic University (TPU) ; Institute of Electrical and Electronics Engineers (IEEE) ; ed. N. A. Ratakhin _v[P. 1155-1159] _d2020 |
|
| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _amultilayer coatings | |
| 610 | 1 | _aZr/Nb | |
| 610 | 1 | _aGD–OES | |
| 610 | 1 | _aEAS | |
| 610 | 1 | _aмногослойные покрытия | |
| 610 | 1 | _aпорошки | |
| 610 | 1 | _aлазерное спекание | |
| 701 | 1 |
_aShulepov _bI. A. _cphysicist _cEngineer-designer of Tomsk Polytechnic University, Candidate of physical and mathematical sciences _f1954- _gIvan Anisimovich _2stltpush _3(RuTPU)RU\TPU\pers\33092 |
|
| 701 | 1 |
_aLomygin _bA. _cphysicist _cengineer of Tomsk Polytechnic University _f1997- _gAnton _2stltpush _3(RuTPU)RU\TPU\pers\45578 |
|
| 701 | 1 |
_aLaptev _bR. S. _cphysicist, specialist in the field of non-destructive testing _cAssociate Scientist of Tomsk Polytechnic University, Assistant, Candidate of Sciences _f1987- _gRoman Sergeevich _2stltpush _3(RuTPU)RU\TPU\pers\31884 |
|
| 701 | 1 |
_aKashkarov _bE. B. _cPhysicist _cAssociate Scientist of Tomsk Polytechnic University, Assistant _f1991- _gEgor Borisovich _2stltpush _3(RuTPU)RU\TPU\pers\34949 |
|
| 701 | 1 |
_aSyrtanov _bM. S. _cphysicist _cengineer of Tomsk Polytechnic University _f1990- _gMaksim Sergeevich _2stltpush _3(RuTPU)RU\TPU\pers\34764 |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет _bИнженерная школа ядерных технологий _bОтделение экспериментальной физики _h7865 _2stltpush _3(RuTPU)RU\TPU\col\23549 |
| 801 | 2 |
_aRU _b63413507 _c20210203 _gRCR |
|
| 856 | 4 | _uhttps://doi.org/10.1109/EFRE47760.2020.9241958 | |
| 942 | _cCF | ||