000 05145nlm2a2200505 4500
001 663944
005 20231030041913.0
035 _a(RuTPU)RU\TPU\network\35114
035 _aRU\TPU\network\35019
090 _a663944
100 _a20210318a2019 k y0engy50 ba
101 0 _aeng
105 _ay z 100zy
135 _adrgn ---uucaa
181 0 _ai
182 0 _ab
200 1 _aTemperature gradients in targets with high-intensity implantation and their influence on the characteristics of ion-modified layers
_fA. I. Ryabchikov, I. V. Lopatin, P. S. Ananin [et al.]
203 _aText
_celectronic
300 _aTitle screen
320 _a[References: 17 tit.]
330 _aThis paper is devoted to the study of the gradient temperature field dynamics and distribution in the metal targets irradiated with high-intensity beams of gas and metal ions. The investigations concerned ion implantation modes with the ion beam current density from several tens of mAcm-2 up to Acm-2 were investigated. The ion beam power was additionally varied due to the change of ion energy in the range from 0.6 to several keV and the pulse duty factor in the range of 0.2-0.8. The integral temperature of the target was measured with an electrically isolated thermocouple. To measure the dynamic change in the local temperature on the irradiated target a high-temperature pulse pyrometer KLEIBER 740-LO was used. The problem of temperature evolution and metal sample melting under the exposure of a high-intensity repetitively pulsed ion beam was solved numerically using the heat conduction equation written in cylindrical coordinates. Analysis of the experimental data obtained with the use of electrically isolated thermocouple, pulse pyrometer, and numerical simulation revealed the presence of significant gradient temperature fields both over the surface and along the depth of targets irradiated by high-intensity ion beams.
461 1 _0(RuTPU)RU\TPU\network\3526
_tJournal of Physics: Conference Series
463 _tVol. 1393 : Gas Discharge Plasmas and Their Applications (GDP 2019)
_o14th International Conference 15-21 September 2019, Tomsk, Russia
_v[012021, 10 p.]
_d2019
610 1 _aэлектронный ресурс
610 1 _aтруды учёных ТПУ
610 1 _aградиенты
610 1 _aионно-модифицированные слои
610 1 _aметаллические мишени
610 1 _aионная имплантация
610 1 _aионные пучки
610 1 _aтемпературные поля
701 1 _aRyabchikov
_bA. I.
_cProfessor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences
_cphysicist
_f1950-
_gAleksandr Ilyich
_2stltpush
_3(RuTPU)RU\TPU\pers\30912
701 1 _aLopatin
_bI. V.
_gIljya Viktorovich
701 1 _aAnanin
_bP. S.
_cphysicist
_csenior researcher of Tomsk Polytechnic University, candidate of physical and mathematical sciences
_f1942-
_gPetr Semenovich
_2stltpush
_3(RuTPU)RU\TPU\pers\35673
701 1 _aBleykher (Bleicher)
_bG. A.
_cphysicist
_cProfessor of Tomsk Polytechnic University, Doctor of Physical and Mathematical Sciences
_f1961-
_gGalina Alekseevna
_2stltpush
_3(RuTPU)RU\TPU\pers\31496
701 1 _aIvanova
_bA. I.
_cphysicist
_cAssociate Scientist of Tomsk Polytechnic University
_f1987-
_gAnna Ivanovna
_2stltpush
_3(RuTPU)RU\TPU\pers\36986
701 1 _aKoval
_bT. V.
_cmathematician, physicist
_cProfessor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences
_f1953-
_gTamara Vasilievna
_2stltpush
_3(RuTPU)RU\TPU\pers\34227
701 1 _aModebadze
_bG. S.
_cSpecialist in the field of nuclear technologies
_cEngineer of Tomsk Polytechnic University
_f1994-
_gGeorgy Slavovich
_2stltpush
_3(RuTPU)RU\TPU\pers\44999
701 1 _aSivin
_bD. O.
_cphysicist
_cSenior researcher of Tomsk Polytechnic University, Candidate of technical sciences
_f1978-
_gDenis Olegovich
_2stltpush
_3(RuTPU)RU\TPU\pers\34240
712 0 2 _aНациональный исследовательский Томский политехнический университет
_bИнженерная школа ядерных технологий
_bНаучная лаборатория высокоинтенсивной имплантации ионов
_h7868
_2stltpush
_3(RuTPU)RU\TPU\col\23698
712 0 2 _aНациональный исследовательский Томский политехнический университет
_bИнженерная школа ядерных технологий
_bНаучно-образовательный центр Б. П. Вейнберга
_h7866
_2stltpush
_3(RuTPU)RU\TPU\col\23561
712 0 2 _aНациональный исследовательский Томский политехнический университет
_bИнженерная школа информационных технологий и робототехники
_bОтделение информационных технологий
_h7951
_2stltpush
_3(RuTPU)RU\TPU\col\23515
801 2 _aRU
_b63413507
_c20210319
_gRCR
856 4 _uhttp://dx.doi.org/10.1088/1742-6596/1393/1/012021
942 _cCF