000 03612nlm1a2200517 4500
001 666273
005 20231030042031.0
035 _a(RuTPU)RU\TPU\network\37477
035 _aRU\TPU\network\35163
090 _a666273
100 _a20211214a2020 k y0engy50 ba
101 0 _aeng
102 _aUS
135 _adrcn ---uucaa
181 0 _ai
182 0 _ab
200 1 _aDevelopment and Study of the Properties of Impact-Resistant Ceramic Nanocomposite Coatings for Silicon
_fI. A. Bozhko, M. P. Kalashnikov, M. V. Fedorishcheva [et al.]
203 _aText
_celectronic
300 _aTitle screen
320 _a[References: 9 tit.]
330 _aThe results of studies of the microstructure, phase state, and physicomechanical properties of 3 m thick Al-Si-N and Zr-Y-O coatings obtained by pulsed magnetron sputtering on the surface of single-crystal m-Si are reported. It was found that for Al-Si-N and Zr-Y-O coatings the light transmittance in the visible range of the spectrum reaches 83 and 78%, respectively. It was shown that the crack resistance of m-Si samples with protective coatings is two to three times higher than that for the initial silicon samples. The results of laboratory tests of the resistance of the samples to impact loads on interaction with a flow of high-speed (5 - 7 kmsec) solid microparticles of Fe showed that 3 m thick protective coatings on m-Si samples makes it possible to suppress surface erosion of the latter by preventing the formation of fine craters.
333 _aРежим доступа: по договору с организацией-держателем ресурса
338 _bРоссийский научный фонд
_d16-19-10264
461 _tGlass and Ceramics
463 _tVol. 77, iss. 3-4
_v[P. 149-153]
_d2020
610 1 _aэлектронный ресурс
610 1 _aтруды учёных ТПУ
610 1 _apulsed magnetron sputtering
610 1 _aprotective coatings
610 1 _aoptically transparent coatings
610 1 _acrack resistance
610 1 _aimpact resistance
610 1 _aмагнетронные напыления
610 1 _aзащитные покрытия
610 1 _aтрещиностойкость
610 1 _aударопрочность
610 1 _aкерамические покрытия
701 1 _aBozhko
_bI. A.
_cphysicist
_cAssociate Professor of Tomsk Polytechnic University, Candidate of physical and mathematical sciences
_f1980-
_gIrina Aleksandrovna
_2stltpush
_3(RuTPU)RU\TPU\pers\34206
701 1 _aKalashnikov
_bM. P.
_cphysicist
_cEngineer of Tomsk Polytechnic University
_gMark Petrovich
_2stltpush
_3(RuTPU)RU\TPU\pers\33561
701 1 _aFedorishcheva
_bM. V.
_cphysicist
_cAssociate Professor of Tomsk Polytechnic University, candidate of physical and mathematical sciences
_f1958-
_gMarina Vladimirovna
_2stltpush
_3(RuTPU)RU\TPU\pers\35812
701 1 _aKhristenko
_bYu. F.
_gYury Fedorovich
701 1 _aSergeev
_bV. P.
_cspecialist in the field of materials science
_cProfessor of Tomsk Polytechnic University, doctor of technical Sciences
_f1949-
_gViktor Petrovich
_2stltpush
_3(RuTPU)RU\TPU\pers\32730
712 0 2 _aНациональный исследовательский Томский политехнический университет
_bИнженерная школа новых производственных технологий
_bОтделение материаловедения
_h7871
_2stltpush
_3(RuTPU)RU\TPU\col\23508
801 2 _aRU
_b63413507
_c20211214
_gRCR
856 4 _uhttps://doi.org/10.1007/s10717-020-00259-8
942 _cCF