| 000 | 03222nlm1a2200385 4500 | ||
|---|---|---|---|
| 001 | 669383 | ||
| 005 | 20231030042220.0 | ||
| 035 | _a(RuTPU)RU\TPU\network\40623 | ||
| 035 | _aRU\TPU\network\39279 | ||
| 090 | _a669383 | ||
| 100 | _a20230426a2023 k y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 102 | _aNL | ||
| 135 | _adrcn ---uucaa | ||
| 181 | 0 | _ai | |
| 182 | 0 | _ab | |
| 200 | 1 |
_aComparative analysis of working gas composition impact on diamond films microstructure _fA. V. Gaydaychuk, S. A. Linnik, A. S. Mitulinsky [et al.] |
|
| 203 |
_aText _celectronic |
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| 300 | _aTitle screen | ||
| 320 | _a[References: 36 tit.] | ||
| 330 | _aThe paper report a diamond films with dendrite-like or nanofeathers structure. Such structures was synthesized both in CH4/H2 (12.2–19.3 vol.% CH4) and CH4/H2/N2 (7–18.5 vol.% N2) working gas mixture. The resulting diamond dendrites are composed of diamond crystallites of various sizes, as well as non-diamond carbon, with a height comparable to the film thickness and a lateral size does not exceed 200 nm (the minimum size of detected diamond crystallites is ? 5 nm). Such diamond structure seems cannot be classified to either conventionally nano- or ultrananocrystalline films. It is shown that nitrogen-rich diamond films have a larger size of both individual diamond crystallites and dendrites, as well as a higher level of residual stresses and roughness, compared to nitrogen-free diamond films. At the same time, nitrogen-free films have higher values of hardness and Young's modulus. | ||
| 333 | _aРежим доступа: по договору с организацией-держателем ресурса | ||
| 461 | _tSurfaces and Interfaces | ||
| 463 |
_tVol. 37 _v[102717, 7 p.] _d2023 |
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| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 701 | 1 |
_aGaydaychuk _bA. V. _cphysicist _cPostgraduate, Engineer - Researcher of Tomsk Polytechnic University _f1984- _gAlexander Valerievich _2stltpush _3(RuTPU)RU\TPU\pers\32876 |
|
| 701 | 1 |
_aLinnik _bS. A. _cphysicist _cEngineer-Researcher of Tomsk Polytechnic University _f1985- _gStepan Andreevich _2stltpush _3(RuTPU)RU\TPU\pers\32877 |
|
| 701 | 1 |
_aMitulinsky _bA. S. _celectric power specialist _ctechnician of Tomsk Polytechnic University _f1998- _gAleksandr Sergeevich _2stltpush _3(RuTPU)RU\TPU\pers\47113 |
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| 701 | 1 |
_aZenkin _bS. P. _cphysicist _cResearcher of Tomsk Polytechnic University _f1988- _gSergey Petrovich _2stltpush _3(RuTPU)RU\TPU\pers\41880 |
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| 701 | 1 |
_aBulakh _bV. A. _cchemist _cTechnician of Tomsk Polytechnic University _f2002- _gVlada Aleksandrovna _2stltpush _3(RuTPU)RU\TPU\pers\47560 |
|
| 712 | 0 | 2 |
_aНациональный исследовательский Томский политехнический университет _bИнженерная школа новых производственных технологий _bНаучно-производственная лаборатория "Импульсно-пучковых, электроразрядных и плазменных технологий" _h7882 _2stltpush _3(RuTPU)RU\TPU\col\23502 |
| 801 | 2 |
_aRU _b63413507 _c20230426 _gRCR |
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| 856 | 4 | _uhttps://doi.org/10.1016/j.surfin.2023.102717 | |
| 942 | _cCF | ||