A Cathode Unit for High-Dose Implantation of Semiconductor Materials [Electronic resource] / B. P. Gritsenko, V. V. Bespalov
Язык: английский.Страна: Россия.Серия: Beam and plasma sourcesРезюме или реферат: The implantation of semiconductor materials in metals and alloys essentially extends the capabilities of modifying their superficial properties. However, the use of silicon or other semiconductor materials as a cathode in the existing designs of ion sources is complicated because of their low electric conductivity. The purpose of the given work was the development of a cathodic unit of an ion source where not only metals but also nonmetallic materials can be used as cathode materials to increase the stability of arc-firing and burning..Примечания о наличии в документе библиографии/указателя: [References: p. 50 (4 tit.)].Аудитория: .Тематика: физика | плазма | полупроводниковые материалы | катодные узлы | ионные источники | высокодозная имплантация | катодные материалы | труды учёных ТПУ | электронный ресурс Ресурсы он-лайн:Щелкните здесь для доступа в онлайнНет реальных экземпляров для этой записи
Title from the title-page.
[References: p. 50 (4 tit.)]
The implantation of semiconductor materials in metals and alloys essentially extends the capabilities of modifying their superficial properties. However, the use of silicon or other semiconductor materials as a cathode in the existing designs of ion sources is complicated because of their low electric conductivity. The purpose of the given work was the development of a cathodic unit of an ion source where not only metals but also nonmetallic materials can be used as cathode materials to increase the stability of arc-firing and burning.
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