Influence of Crystal Defects on the Reflectivity of the Aluminum / S. P. Umnov, O. Kh Asainov, A. N. Lemachko

Уровень набора: (RuTPU)RU\TPU\network\5920, Applied Mechanics and Materials, Scientific JournalОсновной Автор-лицо: Umnov, S. P., physicist, Senior researcher of Tomsk Polytechnic University, Candidate of physical and mathematical sciences, 1957-, Sergey PavlovichАльтернативный автор-лицо: Asainov, O. Kh., physicist, Head of the laboratory of Tomsk Polytechnic University, Candidate of physical and mathematical sciences, 1957-, Oleg Khaydarovich;Lemachko, A. N.Коллективный автор (вторичный): Национальный исследовательский Томский политехнический университет (ТПУ), Физико-технический институт (ФТИ), Кафедра технической физики (№ 23) (ТФ), Лаборатория № 16Язык: английский.Серия: Material Engineering and TechnologiesРезюме или реферат: The effect of ion-assisted deposition of the Al films on their UV reflectance is investigated in this paper. The films' reflectance is measured by a spectrophotometer. The obtained films are examined by using transmission electron microscopy (TEM), X-ray diffraction analysis (XRD), and atomic force microscopy (AFM). The TEM and AFM measurements allow the determination of the size of crystallites in a film and its microstructure. The XRD analysis reveals that the films deposited with argon ion-beam assist are characterized by much higher microstress levels compared to the films deposited without ion assist. The comparison of the Al films’ reflectance measurements indicate that the films with a higher microstress level (hence, higher defect concentration) are characterized by the enhanced reflectance in the UV region. The conducted investigation shows that the defects of the Al films’ crystalline structure affect its optical properties..Аудитория: .Тематика: электронный ресурс | труды учёных ТПУ | дефекты | кристаллические решетки | магнетронное распыление | коэффициенты отражения Ресурсы он-лайн:Щелкните здесь для доступа в онлайн
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The effect of ion-assisted deposition of the Al films on their UV reflectance is investigated in this paper. The films' reflectance is measured by a spectrophotometer. The obtained films are examined by using transmission electron microscopy (TEM), X-ray diffraction analysis (XRD), and atomic force microscopy (AFM). The TEM and AFM measurements allow the determination of the size of crystallites in a film and its microstructure. The XRD analysis reveals that the films deposited with argon ion-beam assist are characterized by much higher microstress levels compared to the films deposited without ion assist. The comparison of the Al films’ reflectance measurements indicate that the films with a higher microstress level (hence, higher defect concentration) are characterized by the enhanced reflectance in the UV region. The conducted investigation shows that the defects of the Al films’ crystalline structure affect its optical properties.

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