APA

Sidelev D. V., Yuriev Y. N., .The Reactive Deposition of TiO[x] Thin Films. : .

Chicago

Sidelev D V, Yuriev Yu N, .The Reactive Deposition of TiO[x] Thin Films. : .

Harvard

Sidelev D. V., Yuriev Y. N., .The Reactive Deposition of TiO[x] Thin Films. : .

MLA

Sidelev D V, Yuriev Yu N, .: . .