APA

Kozin K. A., Goryunov A. G., Manenti F., Rossi F. & Stolpovsky A. E.Development of an Advanced Control System for a ChemicalVapor Deposition (CVD) Reactor for Polysilicon Production. : .

Chicago

Kozin K A, Goryunov A G, Manenti F, Rossi F and Stolpovsky A E.Development of an Advanced Control System for a ChemicalVapor Deposition (CVD) Reactor for Polysilicon Production. : .

Harvard

Kozin K. A., Goryunov A. G., Manenti F., Rossi F. and Stolpovsky A. E.Development of an Advanced Control System for a ChemicalVapor Deposition (CVD) Reactor for Polysilicon Production. : .

MLA

Kozin K A, Goryunov A G, Manenti F, Rossi F and Stolpovsky A E.: . .