APA

Musil Y., Javdosnak D., Cerstvy R., Haviar S., Remnev G. E. & Uglov V. V.Effect of energy on the formation of flexible hard Al-Si-N films prepared by magnetron sputtering. : .

Chicago

Musil Y, Javdosnak D, Cerstvy R, Haviar S, Remnev G E and Uglov V V.Effect of energy on the formation of flexible hard Al-Si-N films prepared by magnetron sputtering. : .

Harvard

Musil Y., Javdosnak D., Cerstvy R., Haviar S., Remnev G. E. and Uglov V. V.Effect of energy on the formation of flexible hard Al-Si-N films prepared by magnetron sputtering. : .

MLA

Musil Y, Javdosnak D, Cerstvy R, Haviar S, Remnev G E and Uglov V V.: . .