APA

Grenaderov A. S., Soloviev A. A., Oskomov K. V. & Sypchenko V. S.Influence of deposition conditions on mechanical properties of a-C:H:SiOx films prepared by plasma-assisted chemical vapor deposition method. : .

Chicago

Grenaderov A S, Soloviev A A, Oskomov K V and Sypchenko V S.Influence of deposition conditions on mechanical properties of a-C:H:SiOx films prepared by plasma-assisted chemical vapor deposition method. : .

Harvard

Grenaderov A. S., Soloviev A. A., Oskomov K. V. and Sypchenko V. S.Influence of deposition conditions on mechanical properties of a-C:H:SiOx films prepared by plasma-assisted chemical vapor deposition method. : .

MLA

Grenaderov A S, Soloviev A A, Oskomov K V and Sypchenko V S.: . .