APA

Borisov D. P., Goncharenko I. M., Koval N. N. & Schanin P. M.Plasma-assisted deposition of a three-layer structure by vacuum and gas arcs. : .

Chicago

Borisov D P, Goncharenko I M, Koval N N and Schanin P M.Plasma-assisted deposition of a three-layer structure by vacuum and gas arcs. : .

Harvard

Borisov D. P., Goncharenko I. M., Koval N. N. and Schanin P. M.Plasma-assisted deposition of a three-layer structure by vacuum and gas arcs. : .

MLA

Borisov D P, Goncharenko I M, Koval N N and Schanin P M.: . .