APA

Grenaderov A. S., Soloviev (Solovyev) A. A., Oskomov K. V., Rabotkin S. V., Elgin Y. I., Sypchenko V. S. & Ivanova N. M.Effect of substrate bias and substrate/plasma generator distance on properties of a-C:H:SiOx films synthesized by PACVD. : .

Chicago

Grenaderov A S, Soloviev (Solovyev) A A, Oskomov K V, Rabotkin S V, Elgin Yu I, Sypchenko V S and Ivanova N M.Effect of substrate bias and substrate/plasma generator distance on properties of a-C:H:SiOx films synthesized by PACVD. : .

Harvard

Grenaderov A. S., Soloviev (Solovyev) A. A., Oskomov K. V., Rabotkin S. V., Elgin Y. I., Sypchenko V. S. and Ivanova N. M.Effect of substrate bias and substrate/plasma generator distance on properties of a-C:H:SiOx films synthesized by PACVD. : .

MLA

Grenaderov A S, Soloviev (Solovyev) A A, Oskomov K V, Rabotkin S V, Elgin Yu I, Sypchenko V S and Ivanova N M.: . .