APA

Sidelev D. V., Yurjev Y. N., .Technological features of the dual magnetron sputtering system for reactive deposition of thin film coatings. : .

Chicago

Sidelev D V, Yurjev Y N, .Technological features of the dual magnetron sputtering system for reactive deposition of thin film coatings. : .

Harvard

Sidelev D. V., Yurjev Y. N., .Technological features of the dual magnetron sputtering system for reactive deposition of thin film coatings. : .

MLA

Sidelev D V, Yurjev Y N, .: . .