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[References: 13 tit.]

Silicon-containing calcium phosphate (Si-CaP)coatings were fabricated by radio frequency (rf) magnetronsputtering of targets prepared from hydroxyapatite (HA) powderwith different silicon content. A powder of Si-HA(Ca[10](PO[4])[6-x](SiO[4])[x](OH)[2-x], x=0.5 and 1.72) was prepared bymechanochemical activation and then used as a precursorpowderto prepare a target for sputtering. The titanium substratewas acid etched and treated with pulsed electron beam with anenergy density of 15 J/cm{2}. The phase composition and structure,nanohardness and Young’s modulus of Si-CaP coating depositedon titanium substrate were investigated by X-ray diffraction andnanoindentation test, respectively. The average crystallite size asdetermined by XRD was 28 nm for coatings obtained bysputtering of the target prepared from the Si-HA powder (x=0.5),whereas Si-CaP (Si-HA powder x=1.72) films showed anamorphous structure. The nanohardness and the Young’smodulus of the Si-HA coating (x=0.5) deposited on titaniumtreated by pulsed electron beam treatment are enhanced to 4.5and 113 GPa compared to titanium substrate. Increase of Sicontent resulted in a dramatic reduction of the nanohardness andYoung’s modulus of Si-CaP films. However, Si-CaP with thehighest Si content exhibited significantly lower values of elasticmodulus, but slightly higher values of H/E and H[3]/E[2], than didthe non-coated specimens. Therefore, the structure of films has asignificant effect on tribological and mechanical properties of thedeposited coatings. Rf-magnetron sputtering allowed to produceSi-CaP coatings with higher nanohardness and lower elasticmodulus compared to titanium substrate.

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