Title screen

[References: p. 6 (8 tit.)]

In the given work, experiments on research of formation of titanium nitride doped with copper (≤12 at %) produced by plasma-assisted vacuum arc deposition by evaporation of sintered Ti-Cu cathodes were carried out. It was revealed that Ti-Cu-N coatings have high hardness (≈40 GPa), high elastic recovery (≥50%), low friction coefficient (˜≈0.2) and high adhesion to a substrate compared with typical TiN coatings. By methods of transmission electron microscopy of thin foils and x-ray diffraction, it was showed that the coating crystallites consist of d-TiN with the average crystallite size of 10-30 nm and the sheath of doping elements (copper) with thickness of 2-3 monolayers is formed around of TiN crystallites.