Non-Isothermal Model of Ion Implantation with Combined Ion Beam / E. S. Parfenova, A. G. Knyazeva
Уровень набора: (RuTPU)RU\TPU\network\4816, AIP Conference ProceedingsЯзык: английский.Резюме или реферат: The paper presents a coupling non-isothermal mathematical model of the initial stage of ion implantation into a metal surface. The model takes into account the finiteness of relaxation times of heat and mass fluxes, the presence of stresses and strains arising as a result of particle impact on the substrate surface and due to phenomena of heat and concentration expansion. The model assumes that the ion beam consists of two different components with different relaxation time and diffusion coefficients. The mathematical model was solved numerically. Some investigation results were presented..Примечания о наличии в документе библиографии/указателя: [References: 13 tit.].Аудитория: .Тематика: электронный ресурс | труды учёных ТПУ | ионная имплантация | ионные пучки | математические модели | металлические поверхности | деформации | подложки | коэффициент диффузии Ресурсы он-лайн:Щелкните здесь для доступа в онлайнНет реальных экземпляров для этой записи
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[References: 13 tit.]
The paper presents a coupling non-isothermal mathematical model of the initial stage of ion implantation into a metal surface. The model takes into account the finiteness of relaxation times of heat and mass fluxes, the presence of stresses and strains arising as a result of particle impact on the substrate surface and due to phenomena of heat and concentration expansion. The model assumes that the ion beam consists of two different components with different relaxation time and diffusion coefficients. The mathematical model was solved numerically. Some investigation results were presented.
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