The Mathematical Modeling of the Initial Stage of Ion Implantation into the Target with Coating / E. S. Parfenova
Уровень набора: (RuTPU)RU\TPU\network\11477, Key Engineering Materials, Scientific JournalЯзык: английский.Резюме или реферат: The paper presents a non-isothermal model of the initial stage of ion implantation process. The model takes into account the existence of internal interfaces. The model assumes that the implantable impurity generates mechanical perturbations. These disturbances can propagate at different speeds before and after internal boundary. The examples of the waveform evolution in transition across the border are shown..Аудитория: .Тематика: электронный ресурс | труды учёных ТПУ | покрытия | упругие волны | деформации | диффузии | математические модели | ионная имплантация | мишени | coating | deformation | diffusion | elastic wave | mathematical model | stress Ресурсы он-лайн:Щелкните здесь для доступа в онлайнНет реальных экземпляров для этой записи
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The paper presents a non-isothermal model of the initial stage of ion implantation process. The model takes into account the existence of internal interfaces. The model assumes that the implantable impurity generates mechanical perturbations. These disturbances can propagate at different speeds before and after internal boundary. The examples of the waveform evolution in transition across the border are shown.
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